Subject: [Fwd: Problem raith SNF 2007-02-15 17:43:49: Std sample holder out of level on Piezo post]
From: James Conway <jwc@snf.stanford.edu>
Date: Thu, 15 Feb 2007 18:18:41 -0800

Users will have to modify their approach for large area wafer writes by working within a + - 2 - 4 mm range to ensure adequate focus for high resolution work.
Hope to be able to expedite repairs with RAITH USA Inc.

My apologizes for the interruption to your work,

James Conway


-------- Original Message --------
Subject: Problem raith SNF 2007-02-15 17:43:49: Std sample holder out of level on Piezo post
Date: Thu, 15 Feb 2007 17:43:50 -0800
From: jwc@snf.stanford.edu
To: raith-pcs@snf.stanford.edu


The RAITH 150's Std sample holder is out of level as it lands on Piezo post mounts by a total delta WD of 0.514 mm.
The delta WD going from 0,0 UV to 1, 2.2 U,V on the standard layout for 100 mm wafers is + 0.0072 mm, increasing in the V axis.
Work around method until we repair the P1 Piezo post, which is damaged or simply worn out, is to do all your writes in U direction
over a +- 2 mm range in V, then move to next V increment and adjust focus and write field alignment.
Users should carefully SEM and measure their pattern CD's to specification BEFORE PATTERN TRANSFER.
JAMES CONWAY