Subject: UVN30 & UVN5
From: Jonathan Goldman <jrgold@stanford.edu>
Date: Wed, 20 Aug 2003 20:13:02 -0700

Hi ebeam and raith users,

I'm doing a process with negative resist and I want to try UVN30 and UVN5. 
Does anyone know

1. index of refraction of these materials.
2. have thickness versus spin speed curves?
3. dosage information/data

thanks,
Jonathan
jrgold@stanford.edu