Subject: curing pmma
From: Filip Crnogorac <>
Date: Fri, 08 Jun 2007 15:47:20 -0700

Hi Raith users,

does anyone have experience with curing PMMA resist to achieve greater  
etch resistance? I heard of people using DUV (240nm) exposure for  
15min to harden the PMMA. Any info would be helpful.



Ph.D. Candidate, Stanford University
Department of Electrical Engineering
Center for Integrated Systems
B-103, 420 Via Palou
Stanford, CA 94305