Subject: Re: curing pmma
From: "Ilya Fushman" <ifushman@stanford.edu>
Date: Fri, 8 Jun 2007 19:11:38 -0700
Fri, 8 Jun 2007 19:11:38 -0700
Yes,
Curing with the Karl Suss works well. We exposed for ~1/2 hour, and the etch
resistance goes up, but it is harder to remove the PMMA. The PMMA shrinks by
~ 5-10% as well.
-ilya

On 6/8/07, Filip Crnogorac <filip@stanford.edu> wrote:
>
> Hi Raith users,
>
> does anyone have experience with curing PMMA resist to achieve greater
> etch resistance? I heard of people using DUV (240nm) exposure for
> 15min to harden the PMMA. Any info would be helpful.
>
> Thanks,
>
> Filip
>
> --------------------------------------
> Ph.D. Candidate, Stanford University
> Department of Electrical Engineering
> Center for Integrated Systems
> B-103, 420 Via Palou
> Stanford, CA 94305
>
>


-- 
Ilya Fushman
Applied Physics
Stanford University
cvitae.org/ilya/


Yes,
Curing with the Karl Suss works well. We exposed for ~1/2 hour, and the etch resistance goes up, but it is harder to remove the PMMA. The PMMA shrinks by ~ 5-10% as well.
-ilya

On 6/8/07, Filip Crnogorac <filip@stanford.edu> wrote:
Hi Raith users,

does anyone have experience with curing PMMA resist to achieve greater
etch resistance? I heard of people using DUV (240nm) exposure for
15min to harden the PMMA. Any info would be helpful.

Thanks,

Filip

--------------------------------------
Ph.D. Candidate, Stanford University
Department of Electrical Engineering
Center for Integrated Systems
B-103, 420 Via Palou
Stanford, CA 94305




--
Ilya Fushman
Applied Physics
Stanford University
cvitae.org/ilya/