Subject: Re: Raith update....
From: Mary Tang <mtang@stanford.edu>
Date: Thu, 05 Jul 2007 14:57:54 -0700

Wow!  Congratulations and THANKS!!!

Mary

Xinran Wang wrote:
> Hi All,
>  
> Good news, raith is back up!
>  
> I just worked with Cole from Raith USA to recover the system. We 
> manually moved the robot arm out and moved the stage to the exchange 
> position, and was able to unload the sample holder to loadlock. Right 
> now the sample holder is in loadlock. The gun vacuum is higher than 
> normal value( 2.7E-9mBar, probably because of poor chamber vacuum in 
> the last few days), so Cole recommended we operate under low voltage. 
> Since James is not here, I want to be cautious and ask all users to 
> operate below 10KeV . The gun vacuum should be going down gradually.
> All raith users please carefully monitor the system during your 
> session and inspect your wafer and report and problem to 
> raith.stanford.edu <http://raith.stanford.edu>. James will not be here 
> until next week, so let's try to make raith work normally during this 
> time.
>  
> Thank you.
>  
> Xinran
>
>  
> On 7/5/07, *Mary Tang* <mtang@stanford.edu 
> <mailto:mtang@stanford.edu>> wrote:
>
>     Hi all --
>
>     Cole Loomis just called.  Pretty much as James says, he would like
>     to be
>     able to walk through the system with one of the Champions to
>     confirm a
>     hardware problem before committing to sending a field service engineer
>     out.  It's three hours ahead there -- is anyone available early this
>     afternoon?  If so, please call Raith at:  631-738-9500 -- and you
>     might
>     want to drop an email to him at cl@raithusa.com
>     <mailto:cl@raithusa.com> (and please cc everyone
>     else in the loop.)  If not today, he's expecting someone to call
>     tomorrow.  I'm leaving the machine enabled in my name for now,
>     just in case.
>
>     Thanks!
>
>     Mary
>
>     Xinran Wang wrote:
>     > Hi Raith users, Mary,
>     >
>     > This afternoon I called James and was instructed by him over the
>     phone
>     > to try to solve the raith problem. We were able to pump down the
>     > loadlock and chamber to performe load procedure. But
>     unfortunately the
>     > robot arm is now stuck in the chamber and is unable to move. It's
>     > probably stuck with the sample holder that was inside the chamber.
>     >
>     > At this moment, raith is still down until further notice, James will
>     > contact Raith first thing tomorrow to ask them send some people
>     here.
>     >
>     > Best,
>     > Xinran
>     >
>     >
>     > On 7/4/07, *Mary Tang* < mtang@stanford.edu
>     <mailto:mtang@stanford.edu>
>     > <mailto:mtang@stanford.edu <mailto:mtang@stanford.edu>>> wrote:
>     >
>     >     Hi Andrei, et al --
>     >
>     >     Thanks.  James also contacted me this morning and says that
>     he can
>     >     walk
>     >     the next user through the reset, over the phone.  I've
>     cleared the
>     >     shutdown so that the next user can do this.
>     >
>     >     Mary
>     >
>     >     Andrei Faraon wrote:
>     >
>     >     > I will not be on campus on Thursday morning. Also Ilya Fushman
>     >     in out
>     >     > of town.
>     >     >
>     >     > In case someone else wants to fix the Raith on Thursday
>     morning
>     >     then
>     >     > you must remember that I unplugged two hoses from the load
>     lock
>     >     valve
>     >     > controller on the back of the electronics rack that
>     controlls the
>     >     > Raith (third module from bottom). I unplugged the hose
>     labeled P
>     >     and
>     >     > the one labeled Close (I hope I remember correctly) and I
>     connected
>     >     > them together. This way I closed the load lock valve manually.
>     >     >
>     >     > The robot arm is in the loadlock and the loadlock is
>     vented. The
>     >     chuck
>     >     > (metal plate where we put the wafers) is inside the main Raith
>     >     > chamber.
>     >     >
>     >     > I should have cell phone contact on Thursday morning so
>     please
>     >     call me
>     >     > if you need other information.
>     >     >
>     >     > I should be on campus on Thursday afternoon and also all
>     day on
>     >     > Friday, and I can try to bring the tool up in case it will
>     not be
>     >     > fixed on Thursday morning.
>     >     >
>     >     > Regards,
>     >     >
>     >     > Andrei
>     >     >
>     >     >
>     >     >
>     >     > On 7/3/07, Mary Tang < mtang@stanford.edu
>     <mailto:mtang@stanford.edu>
>     >     <mailto:mtang@stanford.edu <mailto:mtang@stanford.edu>>> wrote:
>     >     >
>     >     >> Thanks Andrei --
>     >     >>
>     >     >> I just also spoke with Cole, who says that he is also
>     reluctant
>     >     to give
>     >     >> out the service password.  I suggest that unless James calls
>     >     back that
>     >     >> we go with the plan to call up Joe Klingfus on
>     Thursday.  Are
>     >     you or
>     >     >> some other Raith Champion available?
>     >     >>
>     >     >> Mary
>     >     >>
>     >     >> Andrei Faraon wrote:
>     >     >> > Hi Mary,
>     >     >> >
>     >     >> > I called Main Raith USA line (631) 738-9500 and I spoke on
>     >     the phone
>     >     >> > with Joel. He guided me through the procedure to bring the
>     >     robot arm
>     >     >> > back in the loadlock and close the loadlock valve. I had to
>     >     close the
>     >     >> > valve manually by connecting two hoses from the back of
>     the Raith
>     >     >> > control rack (now they are still connected).
>     >     >> >
>     >     >> > Joel gave me his cell phone (850 445 6140) so we can
>     call him
>     >     once we
>     >     >> > get acess to an administrator account.
>     >     >> >
>     >     >> > I am still waiting for James to call me back.
>     >     >> >
>     >     >> >
>     >     >> > Andrei
>     >     >> >
>     >     >> >
>     >     >> >
>     >     >> > On 7/3/07, Mary Tang <mtang@stanford.edu
>     <mailto:mtang@stanford.edu>
>     >     <mailto:mtang@stanford.edu <mailto:mtang@stanford.edu>>> wrote:
>     >     >> >> Hi everyone --
>     >     >> >>
>     >     >> >> I just spoke with Joe Klingfus, the Raith USA field
>     service guy.
>     >     >> He is
>     >     >> >> very, very reluctant to give us the Raith administrative
>     >     password
>     >     >> >> (understandably.)  I am not sure who Andrei spoke with
>     (Cole
>     >     Loomis?)
>     >     >> >> but Joe was unable to get in touch with the NY office
>     to ask
>     >     about
>     >     >> the
>     >     >> >> situation.  So, here's the deal.  Joe will be available on
>     >     >> Thursday, at
>     >     >> >> 10 am our time, to discuss the situation and walk us
>     through any
>     >     >> >> procedures and, if necessary, provide us with the
>     Raith service
>     >     >> password
>     >     >> >> to get things going.  Joe will get in touch with the NY
>     >     office to
>     >     >> find
>     >     >> >> out exactly what they did with Andrei.
>     >     >> >>
>     >     >> >> So, are there any Raith champions willing and
>     available to talk
>     >     >> with Joe
>     >     >> >> at 10 am Thursday?  Many apologies for the delay, but as
>     >     Raith is
>     >     >> on the
>     >     >> >> East Coast, they've all left for the holiday...
>     >     >> >>
>     >     >> >> In the meantime, I've left the system in shutdown/red,
>     just to
>     >     >> make sure
>     >     >> >> it's safe.  If one of the Raith Champions needs it
>     taken out of
>     >     >> shutdown
>     >     >> >> before Thursday, send me an email or give me a call at
>     home
>     >     -- my
>     >     >> number
>     >     >> >> is on any of the bright pink Emergency sheets posted
>     around
>     >     the lab.
>     >     >> >>
>     >     >> >> Mary
>     >     >> >>
>     >     >> >> --
>     >     >> >> Mary X. Tang, Ph.D.
>     >     >> >> Stanford Nanofabrication Facility
>     >     >> >> CIS Room 136, Mail Code 4070
>     >     >> >> Stanford, CA  94305
>     >     >> >> (650)723-9980
>     >     >> >> mtang@stanford.edu <mailto:mtang@stanford.edu>
>     <mailto:mtang@stanford.edu <mailto:mtang@stanford.edu>>
>     >     >> >> http://snf.stanford.edu
>     >     >> >>
>     >     >> >>
>     >     >> >>
>     >     >> >
>     >     >> >
>     >     >>
>     >     >>
>     >     >> --
>     >     >> Mary X. Tang, Ph.D.
>     >     >> Stanford Nanofabrication Facility
>     >     >> CIS Room 136, Mail Code 4070
>     >     >> Stanford, CA  94305
>     >     >> (650)723-9980
>     >     >> mtang@stanford.edu <mailto:mtang@stanford.edu> <mailto:
>     mtang@stanford.edu <mailto:mtang@stanford.edu>>
>     >     >> http://snf.stanford.edu
>     >     >>
>     >     >>
>     >     >>
>     >     >
>     >     >
>     >
>     >
>
>
>     --
>     Mary X. Tang, Ph.D.
>     Stanford Nanofabrication Facility
>     CIS Room 136, Mail Code 4070
>     Stanford, CA  94305
>     (650)723-9980
>     mtang@stanford.edu <mailto:mtang@stanford.edu>
>     http://snf.stanford.edu
>
>
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu