Subject: Re: Universal holder test
From: James Conway <jwc@snf.stanford.edu>
Date: Fri, 02 May 2008 13:48:03 -0700
Fri, 02 May 2008 13:48:03 -0700
:-)

Thank you for your measurements!
These are very encouraging numbers!

Users should note that I have not yet performed any mechanical 
adjustments to either sample holder as of yet.

Talk with you next Monday afternoon.

James

Byoungil Lee wrote:
> Dear James,
>  
> I have tested the universal holder this morning.
> Fortunately, now, leveling works for 4inch wafer-range !!
>  
> The WD's was
> 5.297 @  -40,0
> 5.229 @  40,0
> 5.259 @  0, -40
>  
> You may want to do a little more adjustment.
>  
> Thank you,
> Byoungil
>  
>
>     ----- Original Message -----
>     *From:* James Conway <mailto:jwc@snf.stanford.edu>
>     *To:* Byoungil Lee <mailto:bilee@stanford.edu>
>     *Sent:* Thursday, May 01, 2008 6:12 PM
>     *Subject:* Re: RAITH Status 18:00 Wednesday -- System repairs
>     completed -- I need to finish more testing tomorrow before
>     releasing to users.
>
>     I have not had the time to get to this point yet.  But likely it
>     is much better than last week!  ;-)
>
>     Give it a try and let me know...
>
>     I will continue on the system tomorrow morning with my Raith Class
>     10 - 2 PM
>
>     Best,
>
>     James Conway
>
>     Byoungil Lee wrote:
>>     Dear James,
>>      
>>     Regarding the condition of Raith, I have a question.
>>     Is the Universal Holder ready also for leveling or height control?
>>     My chip size is about 1cm and it was not possible to get
>>     reasonable WD uniformity across the chip.
>>      
>>     Thank you for your support,
>>     Byoungil
>>      
>>
>>         ----- Original Message -----
>>         *From:* James Conway <mailto:jwc@snf.stanford.edu>
>>         *To:* Raith SNF Mailing list <mailto:raith@snf.stanford.edu>
>>         *Cc:* Cole Loomis -- RAITH USA. <mailto:cl@raithusa.com> ;
>>         Jason Sanabia <mailto:js@raithusa.com> ; Mirwais Aktary
>>         <mailto:ma@raithusa.com>
>>         *Sent:* Wednesday, April 30, 2008 6:43 PM
>>         *Subject:* RAITH Status 18:00 Wednesday -- System repairs
>>         completed -- I need to finish more testing tomorrow before
>>         releasing to users.
>>
>>         *Good Evening Raith Community:
>>         *
>>         Many thanks to the many Users whom have offered assistance, a
>>         spare hand to help me reach things from behind the tool, and
>>         support during this very difficult week.
>>
>>         I believe we have completed repairs to the stage and today I
>>         replaced the O-ring seal to the rear door that prevented me
>>         from pumping down the system last night.  The rear door
>>         O-ring seal is a difficult one to keep in place during
>>         installation and fitting of the door to the chamber. Last
>>         night as I screwed down the door I pinched the O-ring on the
>>         seal surface and it was sliced.
>>
>>         Currently I am pumping down the system,and running up the
>>         FE-Gun. I have successfully completed three automatic and two
>>         manual Load Lock exchanges of the Universal Sample Holder.
>>
>>         Tomorrow I will test each of the two sample holders by
>>         performing the Load Lock exchange five times each to ensure
>>         that we are going to stay up when Users come onto the tool.
>>
>>         I hope to resume the coral schedule in the mid to late
>>         afternoon. Best guess is 3 PM hand off to users on the
>>         schedule. FE-Gum emission should be close to normal levels.
>>
>>         To catch up to the schedule I am asking all users to "Share
>>         the Ride" and  load with others after you to create
>>         opportunities for those whom were impacted by this down time.
>>         It is also now expected that all Users will be in attendance
>>         at the RAITH tool as their exposures complete to reduce idle
>>         system time between reservation slots.
>>
>>         If anyone has any questions please see me during my office hours.
>>
>>         Thank you for your support!
>>
>>         James Conway
>>
>>


:-)

Thank you for your measurements!
These are very encouraging numbers!

Users should note that I have not yet performed any mechanical adjustments to either sample holder as of yet.

Talk with you next Monday afternoon.

James

Byoungil Lee wrote:
Dear James,
 
I have tested the universal holder this morning.
Fortunately, now, leveling works for 4inch wafer-range !!
 
The WD's was
5.297 @  -40,0
5.229 @  40,0
5.259 @  0, -40
 
You may want to do a little more adjustment.
 
Thank you,
Byoungil
 
----- Original Message -----
From: James Conway
To: Byoungil Lee
Sent: Thursday, May 01, 2008 6:12 PM
Subject: Re: RAITH Status 18:00 Wednesday -- System repairs completed -- I need to finish more testing tomorrow before releasing to users.

I have not had the time to get to this point yet.  But likely it is much better than last week!  ;-)

Give it a try and let me know...

I will continue on the system tomorrow morning with my Raith Class 10 - 2 PM

Best,

James Conway

Byoungil Lee wrote:
Dear James,
 
Regarding the condition of Raith, I have a question.
Is the Universal Holder ready also for leveling or height control?
My chip size is about 1cm and it was not possible to get reasonable WD uniformity across the chip.
 
Thank you for your support,
Byoungil
 
----- Original Message -----
Sent: Wednesday, April 30, 2008 6:43 PM
Subject: RAITH Status 18:00 Wednesday -- System repairs completed -- I need to finish more testing tomorrow before releasing to users.

Good Evening Raith Community:

Many thanks to the many Users whom have offered assistance, a spare hand to help me reach things from behind the tool, and support during this very difficult week.

I believe we have completed repairs to the stage and today I replaced the O-ring seal to the rear door that prevented me from pumping down the system last night.  The rear door O-ring seal is a difficult one to keep in place during installation and fitting of the door to the chamber. Last night as I screwed down the door I pinched the O-ring on the seal surface and it was sliced.

Currently I am pumping down the system,and running up the FE-Gun. I have successfully completed three automatic and two manual Load Lock exchanges of the Universal Sample Holder.

Tomorrow I will test each of the two sample holders by performing the Load Lock exchange five times each to ensure that we are going to stay up when Users come onto the tool.

I hope to resume the coral schedule in the mid to late afternoon. Best guess is 3 PM hand off to users on the schedule. FE-Gum emission should be close to normal levels.

To catch up to the schedule I am asking all users to "Share the Ride" and  load with others after you to create opportunities for those whom were impacted by this down time.
It is also now expected that all Users will be in attendance at the RAITH tool as their exposures complete to reduce idle system time between reservation slots.

If anyone has any questions please see me during my office hours.

Thank you for your support!

James Conway