Subject: which metal for lift off
From: "Arash Hazeghi" <ahazeghi@stanford.edu>
Date: Thu, 10 Jul 2008 12:25:27 -0700
Thu, 10 Jul 2008 12:25:27 -0700
Hello RAITH users,

I am writing 50nm square arrays as well as dot arrays on 2% 950K resist. In
order to inspect the quality of the exposure I want to do a quick
metallization + lift off, has anyone tried lift off on dot arrays recently?
What is the ideal metal and thickness?

 

Thank you,

 

Arash

 

 

----------------------------------------------------------------------------
-

Arash Hazeghi

 

PhD Candidate,

Stanford Center for Integrated Systems

420 Via Palou Mall, CIS-X 300

Stanford, CA 94305

phone: +1-(650)-725-0418

 

 

http://www.stanford.edu/~ahazeghi/

 

 



Hello RAITH users,

I am writing 50nm square arrays as well as dot arrays on 2% 950K resist. In order to inspect the quality of the exposure I want to do a quick metallization + lift off, has anyone tried lift off on dot arrays recently? What is the ideal metal and thickness?

 

Thank you,

 

Arash

 

 

-----------------------------------------------------------------------------

Arash Hazeghi

 

PhD Candidate,

Stanford Center for Integrated Systems

420 Via Palou Mall, CIS-X 300

Stanford, CA 94305

phone: +1-(650)-725-0418

 

 

http://www.stanford.edu/~ahazeghi/