Mon, 21 Jul 2008 14:00:49 -0700
Hi,
Has anyone tried dots on 2% 950K resist recently? I tried 120 uC/cm^2 but my
dots where overexposed (~100nm) I was wondering if anyone knows what the
right dose is.
Thank you,
Arash
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Arash Hazeghi
PhD Candidate
Stanford Center for Integrated Systems
CIS-X 300, 420 Via Palou Mall,
Stanford, CA 94305
phone: +1-650-725-0418
web: http://www.stanford.edu/~ahazeghi
Hi,
Has anyone tried dots on 2% 950K resist recently? I tried
120 uC/cm^2 but my dots where overexposed (~100nm) I was wondering if anyone
knows what the right dose is.
Thank you,
Arash
----------------------------------------------------------------------------------
Arash Hazeghi
PhD Candidate
Stanford Center for Integrated Systems
CIS-X 300, 420 Via Palou Mall,
Stanford, CA 94305
phone: +1-650-725-0418
web: http://www.stanford.edu/~ahazeghi