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Subject: Best dose for dots and 2% resist
From: "Arash Hazeghi" <ahazeghi@stanford.edu>
Date: Mon, 21 Jul 2008 14:00:49 -0700
Mon, 21 Jul 2008 14:00:49 -0700 
Hi,

Has anyone tried dots on 2% 950K resist recently? I tried 120 uC/cm^2 but my
dots where overexposed (~100nm) I was wondering if anyone knows what the
right dose is.

 

Thank you,

Arash

 

 

 

 

----------------------------------------------------------------------------
------

Arash Hazeghi

 

PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall, 

Stanford, CA 94305

 

phone: +1-650-725-0418

web: http://www.stanford.edu/~ahazeghi

Hi,

Has anyone tried dots on 2% 950K resist recently? I tried 120 uC/cm^2 but my dots where overexposed (~100nm) I was wondering if anyone knows what the right dose is.

 

Thank you,

Arash

 

 

 

 

----------------------------------------------------------------------------------

Arash Hazeghi

 

PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall,

Stanford, CA 94305

 

phone: +1-650-725-0418

web: http://www.stanford.edu/~ahazeghi

 

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