Subject: Re: RAITH is DOWN
From: Dirk Englund <englund@stanford.edu>
Date: Mon, 17 Nov 2008 22:54:34 -0800
Mon, 17 Nov 2008 22:54:34 -0800
Bad subject line in the last email. Raith is down.

On Nov 17, 2008, at 10:52 PM, Dirk Englund wrote:

> Hello,
>
> I encountered the load lock error concerning the reach of the robot  
> arm. My chip loaded, but the stage does not reach the load lock  
> anymore. I tried correcting the problem manually, but it did not  
> work.  The next users will probably need to wait for James to fix  
> this.
>
> The specific error is:
>
> "Error LoadLock:
> It is not possible to reach the outer position of the robot arm!"
>
> -Dirk
>
>
> On Nov 17, 2008, at 7:29 PM, Xu Tian wrote:
>
>> Since James' exposure is done and nobody is using the machine. I  
>> will take the liberty to load my wafer and do a test writing now.  
>> Just to let you know.
>>
>> Xu Tian
>> ----- Original Message -----
>> From: toecutter@att.blackberry.net
>> To: "EBEAM Ebeam Lab" <raith@snf.stanford.edu>
>> Cc: "Eva Pavelka" <evapav1@yahoo.com>, "Cole Loomis"  
>> <cl@raithusa.com>, "Lev Markov" <lm@raithusa.com>
>> Sent: Monday, November 17, 2008 6:36:02 PM GMT -08:00 US/Canada  
>> Pacific
>> Subject: RAITH is up for users
>>
>>
>> RAITH is up for users
>>
>> We ran a qualification run and it went well and the system is  
>> exposing now and should be finished about 7:30 PM
>>
>> Ready for your test writes and I will inspect the EBL results in  
>> the morning.
>> Thank you for your support!
>>
>> James Conway
>> Call me immediately if you run into problems
>> Sent via BlackBerry by AT&T
>
> Postdoctoral Researcher in Electrical Engineering
> Stanford University
> cvitae.org/englund/
>
>
>
>
>

Postdoctoral Researcher in Electrical Engineering
Stanford University
cvitae.org/englund/







Bad subject line in the last email. Raith is down.

On Nov 17, 2008, at 10:52 PM, Dirk Englund wrote:

Hello, 

I encountered the load lock error concerning the reach of the robot arm. My chip loaded, but the stage does not reach the load lock anymore. I tried correcting the problem manually, but it did not work.  The next users will probably need to wait for James to fix this. 

The specific error is: 

"Error LoadLock:
It is not possible to reach the outer position of the robot arm!"

-Dirk
 

On Nov 17, 2008, at 7:29 PM, Xu Tian wrote:

Since James' exposure is done and nobody is using the machine. I will take the liberty to load my wafer and do a test writing now. Just to let you know.

Xu Tian
----- Original Message -----
From: toecutter@att.blackberry.net
To: "EBEAM Ebeam Lab" <raith@snf.stanford.edu>
Cc: "Eva Pavelka" <evapav1@yahoo.com>, "Cole Loomis" <cl@raithusa.com>, "Lev Markov" <lm@raithusa.com>
Sent: Monday, November 17, 2008 6:36:02 PM GMT -08:00 US/Canada Pacific
Subject: RAITH is up for users


RAITH is up for users

We ran a qualification run and it went well and the system is exposing now and should be finished about 7:30 PM

Ready for your test writes and I will inspect the EBL results in the morning.
Thank you for your support!

James Conway
Call me immediately if you run into problems
Sent via BlackBerry by AT&T

Postdoctoral Researcher in Electrical Engineering
Stanford University
cvitae.org/englund/






Postdoctoral Researcher in Electrical Engineering
Stanford University
cvitae.org/englund/