Subject: Etching EBL patterns with STSetch
From: Goeckeritz Jeremy <goeckeri@yahoo.com>
Date: Fri, 12 Dec 2008 16:36:33 -0800 (PST)

Hi,

I'm trying to etch Silicon gratings about 250 nm wide several microns deep using a ZEP
resist mask.  Does anyone have experience in this area?  

I'm primarily looking for an etch rate, even a ballpark starting point would be useful.
 I'm headed back to Salt Lake City on Wednesday, so any help before then would be greatly
appreciated.

Best Regards,
Jeremy

University of Utah
50 S Central Campus Drive
Salt Lake City, UT 84112
MEB Rm 1448
Office: 801-587-9462
Cell: 801-815-9981