Subject: Liftoff recipe for maN2403 From: Joong Sun Park <mrjpark@stanford.edu>
Date: Tue, 24 Mar 2009 00:18:34 -0700
Hi Raith group,
I'm just wondering whether someone knows the liftoff recipe for
maN2403 resist.
I will deposit 80nm platinum with innotec.
Thanks in advance.
Joongsun