Tue, 24 Mar 2009 12:36:59 -0800
Normally negative tone materials are not employed for lift off
metallization as that they normally have a vertical resist profile and
not one with a undercut suitable for metal liftoff.
See me during my office hour is you need more information.
James Conway
Joong Sun Park wrote:
> Hi Raith group,
> I'm just wondering whether someone knows the liftoff recipe for
> maN2403 resist.
> I will deposit 80nm platinum with innotec.
> Thanks in advance.
>
> Joongsun
>
>
Normally negative tone
materials are not employed for lift off metallization as that they
normally have a vertical resist profile and not one with a undercut
suitable for metal liftoff.
See me during my office hour is you need more information.
James Conway
Joong Sun Park wrote:
Hi Raith group,
I'm just wondering whether someone knows the liftoff recipe for maN2403
resist.
I will deposit 80nm platinum with innotec.
Thanks in advance.
Joongsun