Subject: ZEP mask for reactive ion etching of oxide
From: Alex <alexneu@gmail.com>
Date: Tue, 8 Sep 2009 18:05:01 -0700
Tue, 8 Sep 2009 18:05:01 -0700
Hi all,
I'd like to pattern high resolution holes in a 15nm thick layer of oxide on
degenerately n-doped Si.  Has anyone used ZEP as a mask for oxide etching?
Thanks,
Alex


Alex Neuhausen
PhD Candidate Electrical Engineering
Goldhaber-Gordon Lab
476 Lomita Mall
Stanford, CA 94305
Office: 650-725-2047
Cell: 650-776-5672


Hi all,
I'd like to pattern high resolution holes in a 15nm thick layer of oxide on degenerately n-doped Si.  Has anyone used ZEP as a mask for oxide etching?
Thanks,
Alex


Alex Neuhausen
PhD Candidate Electrical Engineering
Goldhaber-Gordon Lab
476 Lomita Mall
Stanford, CA 94305
Office: 650-725-2047
Cell: 650-776-5672