Greetings RAITH Community:
Please take a careful look at your exposure results since last Thursday
evening on the RAITH system.
I had one poor possibly out of focus result on an exposure performed
yesterday and one second hand report of problems on an exposure last
evening.
While this is unlikely -- it may be that we are a at the end of stable
emission of the FE-Gun and the Beam Current is changing during the
exposure.
Or more likely someone adjusted focus before or while the system was
exposing our job.
What we observed was doses delivered were much lower than expected dose
to clear our patterns using 250 nm ZEP-520 A.
This is also a brand new freshly opened bottle of ZEP-520A but from a
batch near its expiration date. A new bottle is on order.
FYI: 9:30 to 10 AM tomorrow Wednesday we will be taking the system off
line to all Users for our Holiday Shutdown and we will also be
performing a full column preventative maintenance procedure as planned.
Thank you for your support!
James Conway