Subject: ZEP dose
From: Isabell Thomann <>
Date: Tue, 26 Jan 2010 23:03:18 -0800 (PST)

Dear Raith users,

Does anybody know the optimum doses for ZEP520A for writing 30 nm , 20 nm , 10 nm wide
single pixel lines on Aluminum substrates? Also does anyone know ZEP520A film thickness
versus spin coating parameters?


Dr. Isabell Thomann
Postdoctoral Scholar
Department of Materials Science and Engineering
Stanford University