Subject: New 2% and 5% PMMA stocked into Cleanroom cabinets today.
From: James Conway <jwc@snf.stanford.edu>
Date: Wed, 03 Dec 2003 16:57:23 -0800

Greetings Ebeam Users,

I have placed new bottles of both the 2% 950K and 5% 495K Molecular Weight (MW) PMMA into the solvent cabinet in the Cleanroom Service Chase.

Users are reminded that these materials must be dispensed using syringes as per the Ebeam Resist Handling Procedures.
Users have reported good processing results and greater wafer to wafer thickness uniformity across 100 mm wafers when employing the new methodology.
This effort has also greatly reduced the waste, and subsequent cost to SNF, of these expensive engineering materials.

Thank you for your support,

James Conway
Ebeam Technology Group
 
 
 

Ali Javey wrote:

Hi James,

The lab is now out of the 2% 950 K and 5% STD PMMA.  Can you please bring
in some new PMMA?  Thanks.

Best,
Ali