Subject: RE: Jack hammering on Via Pueblo ....
From: "Arash Hazeghi" <>
Date: Mon, 13 Sep 2010 14:20:23 -0700

As of now RAITH is not usable for high-res SEMing due to high levels of
vibration. It is also not possible to do perform align write field because
the image is distorted. I am cancelling the rest of my session.


Arash Hazeghi

PhD Candidate
Stanford Center for Integrated Systems
CIS-X 300, 420 Via Palou Mall, 
Stanford, CA 94305

phone: +1-650-725-0418

-----Original Message-----
From: ToeCutter [] 
Sent: Monday, September 13, 2010 1:02 PM
To: John Shott
Cc: labmembers
Subject: Re: Jack hammering on Via Pueblo ....

While the vibration may be visible on the SEM imaging section of the  
Raith during normal SEM operations, and all of our other SEM's images  
as well, it should not be evident during any Ebeam Lithography writes  
due to the very short dwell times when the system unblanks and is  
actually performing an exposure operation.

If anyone observes any artifact that could be attributed to these  
vibrations, please send me an SEM image and report and claim a free  
lunch from me!

Thank you,

James Conway

On Sep 13, 2010, at 9:32 AM, John Shott <> wrote:

> SNF Lab Members:
> As many of you have learned, there is significant jack hammering  
> activity on Via Pueblo this morning.  We were supposed to receive  
> advance warning of when this would occur and did not.  We are  
> working with Stanford Project Management and McGuire & Hestor to try  
> to get better warning information in the future.
> This activity may disrupt operations of the Raith, SEMs and high- 
> resolution optical lithography.
> We apologize for this inconvenience and will hope to get more  
> advance warning of activities of this type in the future.
> John