Subject: Double layer PMMA dose
From: "Scott D. Andrews" <sandrew@stanford.edu>
Date: Tue, 27 Jan 2004 09:20:11 -0800 (PST)

Hello,

Does anyone have recent data on the proper dot and line dose for the
bilayer PMMA process?  If you also know the undercut you achieved, could
you let me know that as well?

Thank you,
Scott Andrews