Subject: Re: raith error
From: "James W. Conway" <>
Date: Wed, 19 Oct 2011 09:02:26 -0700

I arrived at the tool at ten in the morning and it was unloaded already.

Next time you run into this type of problem please try to retry after 
pressing OK, and if that doesn't work you can always call me 24/7.

All the Best,


On 10/18/2011 1:48 AM, Takuo Tanemura wrote:
> Hi All,
> I have encountered a loadlock error during unloading: "Error 8: 
> MoveStage1stPosition." The Turbo Pump lamp was green, so FAQ No.1 did 
> not solve the problem.  I could not reset the error and my sample is 
> inside.
> I am sorry for the inconvenience.
> Best,
> Takuo Tanemura