Subject: Re: Comment raith SNF 2011-12-03 16:40:20: Update on External Scan Control
From: Jan Petykiewicz <janp@stanford.edu>
Date: Mon, 5 Dec 2011 22:41:08 -0800
Mon, 5 Dec 2011 22:41:08 -0800
I launched Raith first, SmartSEM second and had to manually switch over to
external control during writefield alignment.

-Jan

On Mon, Dec 5, 2011 at 12:16, James W. Conway <jwc@snf.stanford.edu> wrote:

> Kevin,
>
> Thanks for this observation.  I will continue to test to see what trips
> this.
>
> It shouldn't matter either way as multiple hand shakes in communications
> occur before I get to the writing part of the sequence.
>
> If other Users are seeing the horizontal streaks in their patterning,
> missing patterns or strange exposure artifacts resulting from external scan
> control not switching during your patterning -- please report back to this
> list.  I am tracking all exposure errors on the system.  I think it is only
> a rare intermittent problem at this point....
>
> James
>
> On 12/3/2011 4:40 PM, khu834@snf.stanford.edu wrote:
>
>> It seems that this problem only occurs when lauching Raith first,
>> followed by the SmartSEM.
>> If you open SmartSEM, then Raith, everything functions as normal
>>
>>


I launched Raith first, SmartSEM second and had to manually switch over to external control during writefield alignment.

-Jan

On Mon, Dec 5, 2011 at 12:16, James W. Conway <jwc@snf.stanford.edu> wrote:
Kevin,

Thanks for this observation.  I will continue to test to see what trips this.

It shouldn't matter either way as multiple hand shakes in communications occur before I get to the writing part of the sequence.

If other Users are seeing the horizontal streaks in their patterning, missing patterns or strange exposure artifacts resulting from external scan control not switching during your patterning -- please report back to this list.  I am tracking all exposure errors on the system.  I think it is only a rare intermittent problem at this point....

James

On 12/3/2011 4:40 PM, khu834@snf.stanford.edu wrote:
It seems that this problem only occurs when lauching Raith first, followed by the SmartSEM.
If you open SmartSEM, then Raith, everything functions as normal