Subject: Re: NEW THREAD NAME Re: zep doses on new bottle WAS Re: zep
From: "James W. Conway" <jwc@snf.stanford.edu>
Date: Thu, 08 Nov 2012 08:25:13 -0800

This is the second report I have of normal thicknesses as applied...

JWC

On 11/5/2012 3:53 PM, Linda He Yi wrote:
Hi James,

I used the new bottle (zep:anisole = 1:1) last Thursday. Same as before, 5000rpm --> ~100nm film thickness. I haven't done the exposure yet. Will keep you updated about the dose change then. 

Best,
Linda


On Mon, Nov 5, 2012 at 2:47 PM, James W. Conway <jwc@snf.stanford.edu> wrote:
Sounds about right.  Likely the recent batch will clear at the old value of 35 - 40 uC/cm**2 we used to see until the last batch bottle just depleted a week ago.

JWC

On 11/4/2012 12:42 AM, Zongfu Yu wrote:
hi, James,
 I don't how to use nanospec to measure thickness and thus did not do that.
 From my sample,  this batch of ZEP seems to require 20% more dose to have similar clearance as my previous ones using last bottle of ZEP. I am doing another round to confirm this. Will let you know as well.
Zongfu