Subject: James will be away through July 19, 2004 RAITH Champions are in charge...
From: James Conway <jwc@snf.stanford.edu>
Date: Fri, 02 Jul 2004 19:53:26 -0700
Fri, 02 Jul 2004 19:53:26 -0700
Greetings:

I will be away on business through July 19, 2004. 
Raith Champions are in Charge of the system.  See the Who are you going 
to call sheet I have placed on the system or refer to archives. Gigi and 
Arvind are primaries in charge.  I can be reached by cell phone at 
415-412-4825 for emergencies and desperate plights of terror if you 
encounter them.

Please make every effort to cooperate and maximize throughput on the system.
Do please keep up the logbook entries up, and be sure to fill out both 
pages of the log book including:
- recording the APerture and the Beam Current
- record of results and errors you are having on the system in the 
notebook II
- record  exact working Distances used and
             - if or if not you are using focus correction and it or if 
not you observed stitching errors of any magnitude.

I am seeing a firm dependence of focus corrections across small chips 
and stitching breaks in Y on the order of 80 - 120 nm.
I need your data to help work this out upon my return.  76 eyes are 
better than one!

Many nice patterns were written on the RAITH 150 this last two weeks.  
My UVN-30 writes for JPL came out very nice once I got the parameters 
down.  LGX and DWSHIN have this process well optimized...  Smallest dot 
in June 10 nm! Smallest Line from my test 17 nm. 

Please play nicely together, its is supposed to be fun right?!


James Conway
in New York State

offline till 7-19-04



Greetings:

I will be away on business through July 19, 2004. 
Raith Champions are in Charge of the system.  See the Who are you going to call sheet I have placed on the system or refer to archives. Gigi and Arvind are primaries in charge.  I can be reached by cell phone at 415-412-4825 for emergencies and desperate plights of terror if you encounter them.

Please make every effort to cooperate and maximize throughput on the system.
Do please keep up the logbook entries up, and be sure to fill out both pages of the log book including:
- recording the APerture and the Beam Current
- record of results and errors you are having on the system in the notebook II
- record  exact working Distances used and
             - if or if not you are using focus correction and it or if not you observed stitching errors of any magnitude.

I am seeing a firm dependence of focus corrections across small chips and stitching breaks in Y on the order of 80 - 120 nm.
I need your data to help work this out upon my return.  76 eyes are better than one!

Many nice patterns were written on the RAITH 150 this last two weeks.  My UVN-30 writes for JPL came out very nice once I got the parameters down.  LGX and DWSHIN have this process well optimized...  Smallest dot in June 10 nm! Smallest Line from my test 17 nm. 

Please play nicely together, its is supposed to be fun right?!



James Conway
in New York State

offline till 7-19-04


Subject:
FAQ: HOW to get help on the RAITH System during your session -- "Who are your gonna
call"
From:
James Conway <jwc@snf.stanford.edu>
Date:
Fri, 28 May 2004 12:46:49 -0700
To:
Raith SNF Mailing list <raith@snf.stanford.edu>
CC:
Joseph Klingfus <jk@raithusa.com>, Michael Kahl <kahl@raith.de>, "Cole Loomis -- RAITH
USA." <cl@raithusa.com>, Kevin Burcham <kb@raithusa.com>

FAQ ##:  SYSTEM PROBLEMS:  "WHO ARE YOU GOING TO CALL"


Greetings:

I will be away next week attending Three Beams and I wish to formally set into place
a hierarchical structure on what to do and whom to call if you encounter problems on
the RAITH 150 system during my absence, and for those times I am not be available by
cell phone.

Up till now this has been in place informally within the RAITH Champions and has been
mentioned in training sessions after RAITH Group V -- but after a SNAFU that occurred
in my last absence last March I wish to restate this THREAD as an FAQ...

For Example: 

    * You encounter a LOAD LOCK Error 4 on the system and cannot complete the Load/
Unload cycle without an administrator login.
    * The pumps or system hardware are not working normally and the logic may have become
reversed.
    * Beam Blanking Logic is reversed due to an RAITH150.exe application crash when
the beam was unblanked...

   1. If I am available, try to call me on my cell and I will walk you through the Recovery
procedures. 001-415-412-4825
      (NOTE:  I live on the fringe of cell service when at home, and every Monday evening
am off the grid after 10 PM and cannot be reached. Sometimes I can receive a SMS text
messages.  I will respond if I am able to ASAP.

   2. Try to contact a RAITH Champion:
      Luigi Scaccabarozzi gigi@snf.stanford.edu  at 650-725-6970
      Arvind Sundaramurthy  arvisun@stanford.edu (650) 450-0475
      Mark Topinka mtopinka@stanford.edu  1-650-387-6049
      David Fattal dfattal@stanford.edu  650-724-9612 office  650-723-8586 lab

   3. Contact a RAITH USA Application Support Specialist:

Dr. Joseph Klingfus, Applications Scientist jk@raithusa.com  218-483-1267 
    

   4.

For Major Hardware issues and all emergencies with the LEO or RAITH Hardware: 
Contact the  RAITH USA Field Service Manager, Cole Loomis cl@raithusa.com   (631) 738-9500
or Kevin Burcham <kb@raithusa.com> also at the Main Raith USA line (631) 738-9500 
    

Finally unless it is a catastrophic failure and the system becomes unsafe or in the
least terrifying to operate -- please avoid placing the system into RED LIGHT Mode when
I am away.
ALWAYS report all errors and comments to to the CORAL 'Make Comments' or 'Report Problem'
section so it gets logged into our tracking system. To quote John Shott, "Its not a
problem until it is reported to CORAL."

Raith Champions wishing to step forward and gain more training on clearing load lock
errors and recovering from problems are encouraged to see me for further training.

Thank you for your support!

James Conway
Ebeam Technology Group
Stanford Nanofabrication Facility.
650-725-7075
jwc@snf.stanford.edu