Subject: Re: Raith problem
From: cshen@briontech.com
Date: Thu, 29 May 2003 17:06:40 -0700 (PDT)

Yes, the laser stage control is on. And the aperture alignment and
stigmation alignment were fine: I did a contamination dot and it looks
pretty round.Does anyone have this problem before?


> Did you turn on laser stage control?
>
>
> On Thu, 29 May 2003 cshen@briontech.com wrote:
>
>> Date: Thu, 29 May 2003 16:19:30 -0700 (PDT)
>> From: cshen@briontech.com
>> To: raith@snf.stanford.edu
>> Subject: Raith problem
>>
>> When I do write field alignment, I find that the image shifts quite a
>> bit when I change the scan size. In the LEO, the image shifts when I
>> change the mag. I called the LEO guy, he said that the problem is not
>> related to LEO.Does anyone know what's wrong and how to fix it?
>> Thanks a lot.
>> Chongfei
>>
>>
>>