Subject: Please inspect your patterns for Stitching and Butting errors...
From: James Conway <jwc@snf.stanford.edu>
Date: Mon, 20 Sep 2004 16:44:39 -0700


Greetings:

It may have just been the result of my writefield alignment the Zoom V value was near the limit of 1.5255 -- but I did see several rather annoying stitching breaks and possible a butting errors on a pattern write that I wrote across a 100 mm wafer.

Please carefully inspect any patterns you wrote since the system came back up August 28, 2004 and let me know what you are seeing in your inspections.

Thank you for your support!

James Conway