Subject: Re: Problem raith SNF 2008-04-23 19:15:49: calibration are required to piezo post and mech. adjustments to all sample holders need to be completed
Date: Tue, 6 May 2008 16:00:45 -0700

USH now levels within 2.7 to 3.4 um across 90 mm across wafer transit.  tested twice
with same result.
Universal Sample holder should be used by all Users to ensure suitable focus plane for
high resolution EBL.
Testing in a device write to 25 nm features...