Subject: Shutdown raith SNF 2009-04-13 05:05:19: Loadlock Fatal Error
From: bdai@snf.stanford.edu
Date: Mon, 13 Apr 2009 05:05:19 -0700

A fatal error "Error 214: CloseValve" popped up during unloading. Couldn't unload my
wafer and had to shut down Raith.