Subject: Comment raith SNF 2009-09-14 17:01:07: Cleared a load lock error
From: jwc@snf.stanford.edu
Date: Mon, 14 Sep 2009 17:01:08 -0700

Users on the tool alerted me to a Load Lock error that occurred when the turbo pump
to the load lock timed out for an unknown reason.  Either it did not reach the vacuum
or turbine speed set points in the time allowed by the software.  likely spurious event
no cause identified so far.
Users requested to call me direct if this occurs again this evening.
James