Subject: Shutdown raith SNF 2005-01-11 14:01:46: System performance failed to pass qualification
Date: Tue, 11 Jan 2005 14:01:46 -0800

High resolution features failed to be resolved and all features appear grossly overdosed.
 Smallest single pixel lines at dose factor 1 are approximately 1 - 3 um (optical micr.
1000X PL)
system placed into shut down mode. 
JWC 01112005:1356 hrs