Subject: Re: Shutdown raith SNF 2005-01-11 14:01:46: System performance failed to pass qualification
From: jwc@snf.stanford.edu
Date: Thu, 13 Jan 2005 18:20:01 -0800

System still cannot write high resolution features.
SEM functions fine!  Requesting a new electron optics board.
Placing system in yellow mode to allow RAITH Champion access for SEM and CD measurements.
Your attempts at EBL may have poor results -- at your risk.
Another set of eyes may see other problems leading to ID of root cause of problem.
JWC 01132005:1800 hours
High resolution features failed to be resolved and all features appear grossly overdosed.
 Smallest single pixel lines at dose factor 1 are approximately 1 - 3 um (optical micr.
1000X PL)
system placed into shut down mode. 
JWC 01112005:1356 hrs