Subject: Problem raith SNF 2005-02-15 02:38:08: stage stuck in loadlock procedure
From: kychen51@snf.stanford.edu
Date: Tue, 15 Feb 2005 02:38:09 -0800

stage with sample is stuck in the loading chamber.  Vacuum is still on, unable to complete
sequence to unload sample.  On software side, both load/unload sample is in red light
mode.