Subject: Comment raith SNF 2006-01-25 16:30:17: Electrostatic Chuck and Piezo post controls calibrated
From: jwc@snf.stanford.edu
Date: Wed, 25 Jan 2006 16:30:21 -0800

The ESChuck and the piezo post positions used for leveling routines have been recalibrated
and updated calibrations saved onto the system defaults.  Further testing on wafers
on the Std. Sample Holder will be tested tomorrow.  Users may not a change to the center
piezo positions with no concerns. 
James Conway