Subject: Comment raith SNF 2006-10-12 17:22:47: Inital phase of qualification complete. RAITH Returns to service
From: jwc@snf.stanford.edu
Date: Thu, 12 Oct 2006 17:22:48 -0700

Greetings:
I have qualified the raith system this afternoon and the system is now writing its first
write.  All interfaces and sub-system modules are working correctly.  Everything looks
good with left hand short shots to 14 nm. Image ripple from vibration / magnetic fields
/ acoustic influences are within the 5 - 7 nm normal range. Maximum resolution of images
at 500 kX is 5.2 nm, just slightly above specifications for this system,  but I expect
this will improve as we increase the Extraction voltage. 
(Expect 1.5 - 3.5 nm at 10 kV, 1 - 2 nm at 20 kV  - system specs. are 4 nm @ 10 kV and
< 2 nm at 20 kV)
FE-Gun Note: We have a brand new FE-Gun with just 54 hours of run time on it.  Emission
current values are much lower than the previous FE-Gun. This tip will require some time
to run itself in before emission will return to  normal levels.  10 kV / 30 um aperture
Beam I = 0.1256 nA compared to ~ 0.250 nA previously.  Tuesday next week I will increase
Extraction V settings to optimal values for EBL. Currently I have left the FE-GUN set
to the Factory recommended settings on Zeiss Field Service's request.  (4.7 KV)
USERS ARE NOT TO GO ABOVE 10 KV ACCELERATION VOLTAGE UNTIL FURTHER NOTICE. (NEXT WEEK
WE WILL TEST AT HIGHER ACC .VOLTAGES...)
ALL SAMPLES GOING INTO THE SYSTEM MUST BE PRE-BAKED ABOVE 90 DEGREES C FOR 2 MINUTES
TO DESORB YOUR SAMPLES.
ALL USERS ARE ASKED TO BE VERY CAREFUL TO HELP MAINTAIN CLEANLINESS OF THE SYSTEM AND
TO CHANGE GLOVES AS  YOU OPEN THE LL CHAMBER AND REACH IN TO RETRIEVE THE SAMPLE HOLDER.
RAITH CHAMPIONS ONLY ON THE SYSTEM THROUGH SUN. NOON, UNLESS CLEARED BY JAMES CONWAY.
 CALL ME IF YOU OBSERVED ANYTHING UNUSUAL OR ENCOUNTER PROBLEMS ON THE TOOL.
Many thanks to RAITH USA Field service personnel  and application / hardware specialist
in Dortmund and Oberkocken, Germany.
Thank you to Zeiss SMT Field service for their continuing support.  Post morten report
due out Monday or Tuesday next week.
Thank you for your support during this difficult period,
James Conway
Ebeam Lab - SNF