Subject: Problem raith SNF 2007-02-15 17:43:49: Std sample holder out of level on Piezo post
From: jwc@snf.stanford.edu
Date: Thu, 15 Feb 2007 17:43:50 -0800

The RAITH 150's Std sample holder is out of level as it lands on Piezo post mounts by
a total delta WD of 0.514 mm.
The delta WD going from 0,0 UV to 1, 2.2 U,V on the standard layout for 100 mm wafers
is + 0.0072 mm, increasing in the V axis.
Work around method until we repair the P1 Piezo post, which is damaged or simply worn
out, is to do all your writes in U direction over a +- 2 mm range in V, then move to
next V increment and adjust focus and write field alignment.
Users should carefully SEM and measure their patttern CD's to specification BEFORE PATTERN
TRANSFER.
JAMES CONWAY