Subject: Comment raith SNF 2007-12-06 18:26:54: completed stage leveling test on 6 and 4 inch wafer on ESChuck
From: jwc@snf.stanford.edu
Date: Thu, 6 Dec 2007 18:26:55 -0800

was able to level all but the 100 mm 4" wafer.
I will test another 4 inch wafer before shuit down before making any changes to the
chuck adjustable kinetic mounts.
Nice beam today save parameters for 10 kv 20 um apt. onto system.
jwc