Messages 0xx


01: Problem drytek2: Process Cooling Water Flow is Low ((none))
02: Shutdown drytek2: drytek2 cooling water flow 0.2 ((none))
03: Shutdown drytek2: ((none))
04: Problem drytek2: ((none))
05: Problem drytek2: drytek2 is not venting ((none))
06: Shutdown drytek2: Shutdown - chamber cannot vent to ATM ((none))
07: Shutdown drytek2: cleared Shutdown - repaired chamber vent ((none))
08: Problem drytek2: ((none))
09: Problem drytek2: "O2 Plasma" comes up PINK rather than dark blue. Most likely either N2 is flowing in place of O2 or chamber is not purging properly. ((none))
10: Problem drytek2: ((none))
11: Problem drytek2: ((none))
12: Shutdown drytek2: Lots of dust in chamber ((none))
13: Shutdown Clear drytek2: ((none))
14: Shutdown drytek2: ((none))
15: Shutdown Clear drytek2: ((none))
16: Problem Clear drytek2: ((none))
17: Problem Clear drytek2: ((none))
18: Shutdown drytek2: Len (booth.snf.stanford.edu)
19: Problem drytek2: Len 2 (booth.snf.stanford.edu)
20: Problem Clear drytek2: (booth.snf.stanford.edu)
21: Shutdown Clear drytek2: (booth.snf.stanford.edu)
22: Shutdown drytek2: working on chiller¨ (cbaxter.snf.stanford.edu)
23: Shutdown Clear drytek2: (cbaxter.snf.stanford.edu)
24: Problem drytek2: rf power too low, (franklin.snf.stanford.edu)
25: Shutdown drytek2: low rf output (cbaxter.snf.stanford.edu)
26: Problem Clear drytek2: part is installed and tested (cbaxter.snf.stanford.edu)
27: Shutdown Clear drytek2: part installed and tested (cbaxter.snf.stanford.edu)
28: Problem drytek2: No oxygen flow (usriniva.snf.stanford.edu)
29: Shutdown drytek2: no o2 flow... (cbaxter.snf.stanford.edu)
30: Shutdown Clear drytek2: mks controller was,it was bad contact on connector. (cbaxter.snf.stanford.edu)
31: Problem Clear drytek2: reseated connector on display (cbaxter.snf.stanford.edu)
32: Problem drytek2: (grupp.snf.stanford.edu)
33: Problem Clear drytek2: cleared problem - replaced 3-4 flow readout. (booth.snf.stanford.edu)
34: Problem drytek2: top electrode, back right, plastic pin is gone (sminne.snf.stanford.edu)
35: Problem drytek2: no rf power (sylviajs.snf.stanford.edu)
36: Shutdown drytek2: 500pa generator has a blown 7amp fuse. looking for a replacement... (cbaxter.snf.stanford.edu)
37: Shutdown Clear drytek2: changed shorted bridge rectifier and 7amp fuse (cbaxter.snf.stanford.edu)
38: Problem Clear drytek2: change shorted rectifier (cbaxter.snf.stanford.edu)
39: Problem Clear drytek2: installed missing teflon guide.. (cbaxter.snf.stanford.edu)
40: Problem drytek2: flowmeter (michaud.snf.stanford.edu)
41: Problem Clear drytek2: (booth.snf.stanford.edu)
42: Problem drytek2: standby bulb is burned out (beckwith.snf.stanford.edu)
43: Problem Clear drytek2: replaced bulb. (booth.snf.stanford.edu)
44: Problem drytek2: Fixing pin missing on tray 3 (chcheng.snf.stanford.edu)
45: Problem Clear drytek2: installed teflon tip.. (cbaxter.snf.stanford.edu)
46: Problem drytek2: cooling system not operating (utkan.snf.stanford.edu)
47: Shutdown drytek2: no electrode cooling. (booth.snf.stanford.edu)
48: Shutdown Clear drytek2: changed fuse holder and fuse (cbaxter.snf.stanford.edu)
49: Problem Clear drytek2: change fuse (cbaxter.snf.stanford.edu)
50: Problem drytek2: Gives error E10 when trying to start process. Could not get standby to run! Steve (sminne.snf.stanford.edu)
51: Shutdown drytek2: E-10 error (booth.snf.stanford.edu)
52: Shutdown Clear drytek2: door was not closed. (booth.snf.stanford.edu)
53: Problem Clear drytek2: door not closed. (booth.snf.stanford.edu)
54: Problem drytek2: System light burned out (greene.snf.stanford.edu)
55: Problem Clear drytek2: changed light bulb (cbaxter.snf.stanford.edu)
56: Problem Clear drytek2: changed light bulb (cbaxter.snf.stanford.edu)
57: Problem Clear drytek2: (cbaxter.snf.stanford.edu)
58: Problem drytek2: RF on button burnt out. (latta.snf.stanford.edu)
59: Problem Clear drytek2: changed rf on indicator bulb (cbaxter.snf.stanford.edu)
60: Problem drytek2: power (mcp.snf.stanford.edu)
61: Shutdown drytek2: Electrode cooling water at zero flow (sminne.snf.stanford.edu)
62: Shutdown Clear drytek2: removed scale from electrodes. (booth.snf.stanford.edu)
63: Shutdown drytek2: Chilled H2O to electrodes is at zero. (latta.snf.stanford.edu)
64: Shutdown Clear drytek2: fixed chiller & cleared electrodes. (booth.snf.stanford.edu)
65: Shutdown drytek2: Electrode temperature 30degC. (booth.snf.stanford.edu)
66: Shutdown Clear drytek2: set chiller temp. (booth.snf.stanford.edu)
67: Shutdown drytek2: chiller repair. (booth.snf.stanford.edu)
68: Shutdown Clear drytek2: Changed to temporary electrode chiller. (booth.snf.stanford.edu)
69: Shutdown drytek2: need to changed dimister filter (cbaxter.snf.stanford.edu)
70: Shutdown Clear drytek2: demister changed completed (cbaxter.snf.stanford.edu)
71: Shutdown drytek2: drytek 2 cooling water flow = 0. (emes.snf.stanford.edu)
72: Shutdown Clear drytek2: restarted chiller. (booth.snf.stanford.edu)
73: Shutdown drytek2: Cooling electrode too low (pzwahlen.snf.stanford.edu)
74: Shutdown Clear drytek2: restarted water flow (booth.snf.stanford.edu)
75: Problem drytek2: O2 MFC errorDate: Nov 17, 2000 7:28:52 PM (pzwahlen.snf.stanford.edu)
76: Problem drytek2: O2 MFC error (booth.snf.stanford.edu)
77: Problem drytek2: pink powder near lowest electrode (amol.snf.stanford.edu)
78: Problem drytek2: pink powder near lowest electrode (cbaxter.snf.stanford.edu)
79: Shutdown drytek2: Vane pump needs oil. (booth.snf.stanford.edu)
80: Shutdown drytek2: Vane pump needs oil. (booth.snf.stanford.edu)
81: Shutdown drytek2: RF Power Does not turn on (utkan.snf.stanford.edu)
82: Shutdown drytek2: RF Power Does not turn on (latta.snf.stanford.edu)
83: Problem drytek2: Cooling electrode is low (pzwahlen.snf.stanford.edu)
84: Problem drytek2: Cooling electrode is low (booth.snf.stanford.edu)
85: Shutdown drytek2: chiller chang (cbaxter.snf.stanford.edu)
86: Shutdown drytek2: chiller chang (cbaxter.snf.stanford.edu)
87: Shutdown drytek2 2001-01-02 18:24:41: need to change oil (cbaxter.snf.stanford.edu)
88: Re: Shutdown drytek2 2001-01-02 18:24:41: need to change oil (cbaxter.snf.stanford.edu)
89: Problem drytek2 2001-01-03 12:49:37: No forward power (lindaw.snf.stanford.edu)
90: Shutdown drytek2 2001-01-03 13:51:49: No RF. Electrodes need to be flushed... (latta.snf.stanford.edu)
91: Re: Problem drytek2 2001-01-03 12:49:37: No forward power (cbaxter.snf.stanford.edu)
92: Re: Shutdown drytek2 2001-01-03 13:51:49: No RF. Electrodes need to be flushed... (cbaxter.snf.stanford.edu)
93: Problem drytek2 2001-01-04 00:04:15: (davehong.snf.stanford.edu)
94: Shutdown drytek2 2001-01-04 08:48:57: (booth.snf.stanford.edu)
95: Re: Shutdown drytek2 2001-01-04 08:48:57: installed rectifier and all three cooling fan. rf tested (cbaxter.snf.stanford.edu)
96: Re: Problem drytek2 2001-01-04 00:04:15: changed rectifier and cooling fan (cbaxter.snf.stanford.edu)
97: Problem drytek2 2001-01-11 22:53:58: load complete light does not go off (mbadi.snf.stanford.edu)
98: Re: Problem drytek2 2001-01-11 22:53:58: load complete light does not go off (booth.snf.stanford.edu)
99: Shutdown drytek2 2001-01-22 07:49:55: electrode cooling water flow below minimum. (booth.snf.stanford.edu)