Subject: Re: Shutdown yes SNF 2012-11-23 09:26:43: Can't reach vacuum
From: gsosa@snf.stanford.edu

Checked and tightened vacuum fittings. Checked and topped off pump oil.Also tightened
the drain plug on pump. Verified process program. Was able to do several successful
cycles. There is still an intermittant problem with passing the leak check, due to a
leak in the process chamber. We are making plans to have the chamber repaired at the
annual lab closure in December. If the process aborts, restart the program.