Messages 0xx


01: Shutdown drytek4: pumps not working ((none))
02: Shutdown Clear drytek4: added oil to pump. ((none))
03: Problem drytek4: (rpu.snf.stanford.edu)
04: Problem Clear drytek4: replaced bulb (booth.snf.stanford.edu)
05: Shutdown drytek4: Comp Air leak. Comp Air is shut off (mcvittie.snf.stanford.edu)
06: Shutdown Clear drytek4: air is back on... (cbaxter.snf.stanford.edu)
07: Problem drytek4: after hitting the standby button, drytek 4 keeps hissing (lin.snf.stanford.edu)
08: Shutdown drytek4: can not load wafers, solenoid keep hissing (lin.snf.stanford.edu)
09: Shutdown Clear drytek4: changed leaking by solenoid (cbaxter.snf.stanford.edu)
10: Problem Clear drytek4: changed leaking by solenoid (cbaxter.snf.stanford.edu)
11: Problem drytek4 2001-01-16 12:12:39: base pressure isn't zero'd (king.snf.stanford.edu)
12: Re: Problem drytek4 2001-01-16 12:12:39: base pressure isn't zero'd (booth.snf.stanford.edu)
13: Problem drytek4 2001-02-28 13:59:43: process pressure unstable, noisy relay (lin.snf.stanford.edu)
14: Re: Problem drytek4 2001-02-28 13:59:43: process pressure unstable, noisy relay (cbaxter.snf.stanford.edu)
15: Shutdown drytek4 2001-03-01 17:19:50: chamber pressure does not come down (lin.snf.stanford.edu)
16: Re: Shutdown drytek4 2001-03-01 17:19:50: chamber pressure does not come down (cbaxter.snf.stanford.edu)
17: Shutdown drytek4 2001-03-12 07:27:27: freon 116 bottle change (seymour.snf.stanford.edu)
18: Re: Shutdown drytek4 2001-03-12 07:27:27: freon 116 bottle change (seymour.snf.stanford.edu)
19: Problem drytek4 2001-03-26 16:19:46: faulty solenoid on Drytek 4 (szou.snf.stanford.edu)
20: Re: Problem drytek4 2001-03-26 16:19:46: faulty solenoid on Drytek 4 (cbaxter.snf.stanford.edu)
21: Problem drytek4 2001-05-10 13:14:58: Standby lamp burn off (szou.snf.stanford.edu)
22: Re: Problem drytek4 2001-05-10 13:14:58: Standby lamp burn off (booth.snf.stanford.edu)
23: Shutdown drytek4 2001-07-04 23:19:38: Leaking water on floor (sminne.snf.stanford.edu)
24: Re: Shutdown drytek4 2001-07-04 23:19:38: Leaking water on floor (cbaxter.snf.stanford.edu)
25: Problem drytek4 2001-08-08 15:32:34: blown lights (dton.snf.stanford.edu)
26: Re: Problem drytek4 2001-08-08 15:32:34: blown lights (cbaxter.snf.stanford.edu)
27: Problem drytek4 2001-08-23 18:25:19: Pressure during standby is low (dton.snf.stanford.edu)
28: Re: Problem drytek4 2001-08-23 18:25:19: Pressure during standby is low (cbaxter.snf.stanford.edu)
29: Shutdown drytek4 2001-08-25 07:46:46: facility (rcrane.snf.stanford.edu)
30: Re: Shutdown drytek4 2001-08-25 07:46:46: facility (rcrane.snf.stanford.edu)
31: Problem drytek4 2001-09-04 12:05:37: drytek4 does not open (ywu.snf.stanford.edu)
32: Re: Problem drytek4 2001-09-04 12:05:37: drytek4 does not open (cbaxter.snf.stanford.edu)
33: Problem drytek4 2001-10-15 15:48:59: STANDBY light button is OFF (dton.snf.stanford.edu)
34: Problem drytek4 2001-10-29 18:28:04: Electrode cooling water is a bit low (dton.snf.stanford.edu)
35: Re: Problem drytek4 2001-10-29 18:28:04: Electrode cooling water is a bit low (booth.snf.stanford.edu)
36: Problem drytek4 2001-11-17 18:49:48: standby light doesn't work (junxian.snf.stanford.edu)
37: Re: Problem drytek4 2001-11-17 18:49:48: standby light doesn't work (booth.snf.stanford.edu)
38: Problem drytek4 2001-12-07 14:22:58: Cooling water for the electrode is low (dton.snf.stanford.edu)
39: Re: Problem drytek4 2001-12-07 14:22:58: Cooling water for the electrode is low (cbaxter.snf.stanford.edu)
40: Shutdown drytek4 2002-02-28 11:18:58: RF shield clamp repair (volkan.snf.stanford.edu)
41: Problem drytek4 2002-02-28 12:07:57: Water Leak (mcvittie.snf.stanford.edu)
42: Re: Shutdown drytek4 2002-02-28 11:18:58: RF shield clamp repair (cbaxter.snf.stanford.edu)
43: Re: Problem drytek4 2002-02-28 12:07:57: Water Leak (cbaxter.snf.stanford.edu)
44: Problem drytek4 2002-04-09 15:17:01: Accidental emergency shutdown (volkan.snf.stanford.edu)
45: Shutdown drytek4 2002-04-09 15:30:15: Base pressure problem (volkan.snf.stanford.edu)
46: Re: Shutdown drytek4 2002-04-09 15:30:15: Base pressure problem (cbaxter.snf.stanford.edu)
47: Re: Problem drytek4 2002-04-09 15:17:01: Accidental emergency shutdown (cbaxter.snf.stanford.edu)
48: Shutdown drytek4 2002-04-26 10:59:47: Repair endpoint monitor (booth.snf.stanford.edu)
49: Re: Shutdown drytek4 2002-04-26 10:59:47: Repair endpoint monitor (booth.snf.stanford.edu)
50: Problem drytek4 2002-07-12 17:15:56: laser end point detection (sabnis.snf.stanford.edu)
51: Re: Problem drytek4 2002-07-12 17:15:56: laser end point detection (cbaxter.snf.stanford.edu)
52: Shutdown drytek4 2002-08-08 07:08:07: pump maintenance (booth.snf.stanford.edu)
53: Re: Shutdown drytek4 2002-08-08 07:08:07: pump maintenance (booth.snf.stanford.edu)
54: Problem drytek4 2002-10-03 16:22:22: green "standby" led burned (gigi.snf.stanford.edu)
55: Re: Problem drytek4 2002-10-03 16:22:22: green "standby" led burned (cbaxter.snf.stanford.edu)
56: Problem drytek4 2002-10-12 15:44:08: drytek4 problem (sabnis.snf.stanford.edu)
57: Re: Problem drytek4 2002-10-12 15:44:08: drytek4 problem (booth.snf.stanford.edu)
58: Problem drytek4 2002-12-11 12:47:15: standy bulb burned out (true.snf.stanford.edu)
59: Re: Problem drytek4 2002-12-11 12:47:15: standy bulb burned out (cbaxter.snf.stanford.edu)
60: Shutdown drytek4 2002-12-17 21:26:52: routin maint. (cbaxter.snf.stanford.edu)
61: Re: Shutdown drytek4 2002-12-17 21:26:52: routin maint. (cbaxter.snf.stanford.edu)
62: Problem drytek4 2003-01-17 11:10:39: drytek4 nitride etching (sabnis.snf.stanford.edu)
63: Re: Problem drytek4 2003-01-17 11:10:39: drytek4 nitride etching (hphan.snf.stanford.edu)
64: Problem drytek4 2003-01-24 11:10:39: standby LED (volkan.snf.stanford.edu)
65: Re: Problem drytek4 2003-01-24 11:10:39: standby LED (booth.snf.stanford.edu)
66: Testing (Henry Phan)
67: Problem drytek4 2003-05-06 08:15:04: Report Problem for drytek4 (ofidaner.snf.stanford.edu)
68: Re: Problem drytek4 2003-05-06 08:15:04: Report Clear for drytek4 (booth.snf.stanford.edu)
69: Shutdown drytek4 2003-05-19 06:55:31: Report Shutdown for drytek4 (booth.snf.stanford.edu)
70: Re: Shutdown drytek4 2003-05-19 06:55:31: Report Clear for drytek4 (booth.snf.stanford.edu)
71: Problem drytek4 2003-06-30 18:01:13: Report Problem for drytek4 (wistey.snf.stanford.edu)
72: Re: Problem drytek4 2003-06-30 18:01:13: Report Clear for drytek4 (booth.snf.stanford.edu)
73: Problem drytek4 2003-08-03 12:09:34: Report Problem for drytek4 (zlrao.snf.stanford.edu)
74: Re: Problem drytek4 2003-08-03 12:09:34: Report Clear for drytek4 (cbaxter.snf.stanford.edu)
75: GaN Etch (Henry Phan)
76: Re: GaN Etch (Jim McVittie)
77: Problem drytek4 2003-08-30 17:39:27: Report Problem for drytek4 (afreeman.snf.stanford.edu)
78: Re: Problem drytek4 2003-08-30 17:39:27: Report Clear for drytek4 (booth.snf.stanford.edu)
79: Shutdown drytek4 2003-09-04 15:32:08: matching box flames and smoke (true.snf.stanford.edu)
80: Re: Shutdown drytek4 2003-09-04 15:32:08: Report Clear for drytek4 (cbaxter.snf.stanford.edu)
81: Shutdown drytek4 2003-10-07 15:16:02: No water flow on lower electrode (hphan.snf.stanford.edu)
82: Re: Shutdown drytek4 2003-10-07 15:16:02: Report Clear for drytek4 (cbaxter.snf.stanford.edu)
83: Problem drytek4 2003-10-09 10:53:09: Report Problem for drytek4 (kaimeifu.snf.stanford.edu)
84: Shutdown drytek4 2003-10-09 11:09:33: Report Shutdown for drytek4 (kaimeifu.snf.stanford.edu)
85: Re: Shutdown drytek4 2003-10-09 11:09:33: Report Clear for drytek4 (cbaxter.snf.stanford.edu)
86: Re: Problem drytek4 2003-10-09 10:53:09: Report Clear for drytek4 (cbaxter.snf.stanford.edu)
87: Shutdown drytek4 2003-11-13 11:21:30: cannot open chamber (ofidaner.snf.stanford.edu)
88: Re: Shutdown drytek4 2003-11-13 11:21:30: cannot open chamber (booth.snf.stanford.edu)
89: Shutdown drytek4 2003-12-19 11:28:53: Holiday Shutdown (rcrane.snf.stanford.edu)
90: Re: Shutdown drytek4 2003-12-19 11:28:53: Holiday Shutdown (hphan.snf.stanford.edu)
91: Shutdown drytek4 2004-01-08 10:47:39: No lower electrode cooling water (hphan.snf.stanford.edu)
92: Re: Shutdown drytek4 2004-01-08 10:47:39: No lower electrode cooling water (cbaxter.snf.stanford.edu)
93: Problem drytek4 2004-01-12 10:08:13: low electrode water flow is zero (nhelman.snf.stanford.edu)
94: Shutdown drytek4 2004-01-12 10:09:11: lower electrode water flow is zero (nhelman.snf.stanford.edu)
95: Re: Shutdown drytek4 2004-01-12 10:09:11: lower electrode water flow is zero (cbaxter.snf.stanford.edu)
96: Re: Problem drytek4 2004-01-12 10:08:13: low electrode water flow is zero (cbaxter.snf.stanford.edu)
97: Problem drytek4 2004-01-19 13:30:33: F23 round valve loose (crichter.snf.stanford.edu)
98: Re: Problem drytek4 2004-01-19 13:30:33: F23 round valve loose (mcvittie.snf.stanford.edu)
99: Shutdown drytek4 2004-01-26 09:12:58: low electrode water flow (nhelman.snf.stanford.edu)