Messages 0xx

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01: Shutdown Clear ebeam: new tip ((none))
02: Problem ebeam: Ebeam, IP2 not working (thorsten.snf.stanford.edu)
03: Problem Clear ebeam: IP2 OFF (jerabek.snf.stanford.edu)
04: Shutdown ebeam: poor vacuum in load chamber (jerabek.snf.stanford.edu)
05: Shutdown Clear ebeam: test (jerabek.snf.stanford.edu)
06: Shutdown ebeam: shutdown (jerabek.snf.stanford.edu)
07: Shutdown Clear ebeam: shutdown (jerabek.snf.stanford.edu)
08: Shutdown ebeam: ebeam shutdown (jerabek.snf.stanford.edu)
09: Shutdown ebeam: ebeam shutdown (jerabek.snf.stanford.edu)
10: Shutdown ebeam 2000-12-14 10:41:53: This is only a test ... (shott.snf.stanford.edu)
11: Re: Shutdown ebeam 2000-12-14 10:41:53: This is only a test ... (shott.snf.stanford.edu)
12: Problem ebeam 2000-12-14 11:22:15: Test of problem clear ... (shott.snf.stanford.edu)
13: Re: Problem ebeam 2000-12-14 11:22:15: Test of problem clear ... (shott.snf.stanford.edu)
14: Shutdown ebeam 2000-12-14 12:18:24: This is another test of shutdown .... (shott.snf.stanford.edu)
15: Re: Shutdown ebeam 2000-12-14 12:18:24: This is another test of shutdown .... (shott.snf.stanford.edu)
16: Problem ebeam 2001-01-12 18:54:58: Test ...please Ignore (shott.snf.stanford.edu)
17: Re: Problem ebeam 2001-01-12 18:54:58: Test ...please Ignore (shott.snf.stanford.edu)
18: Shutdown ebeam 2001-01-12 18:57:41: Testing ... please Ignore (shott.snf.stanford.edu)
19: Re: Shutdown ebeam 2001-01-12 18:57:41: Testing ... please Ignore (shott.snf.stanford.edu)
20: Shutdown ebeam 2001-01-19 16:57:00: blanking has been fixed (jerabek.snf.stanford.edu)
21: Re: Shutdown ebeam 2001-01-19 16:57:00: blanking has been fixed (jerabek.snf.stanford.edu)
22: Problem ebeam 2001-01-26 12:15:37: ebeam problem (ylin.snf.stanford.edu)
23: Re: Problem ebeam 2001-01-26 12:15:37: ebeam problem (jerabek.snf.stanford.edu)
24: Problem ebeam 2001-02-01 19:25:19: beam current dropped to 0.7nA (greene.snf.stanford.edu)
25: Re: Problem ebeam 2001-02-01 19:25:19: beam current dropped to 0.7nA (jerabek.snf.stanford.edu)
26: Shutdown ebeam 2001-02-08 01:05:23: console inoperative, laser beam off (amol.snf.stanford.edu)
27: Re: Shutdown ebeam 2001-02-08 01:05:23: console inoperative, laser beam off (jerabek.snf.stanford.edu)
28: Problem ebeam 2001-02-12 08:45:18: beam current 0.06nA (usually 3nA) (tkramer.snf.stanford.edu)
29: Problem ebeam 2001-02-12 12:07:57: error code 707 (ylin.snf.stanford.edu)
30: Problem ebeam 2001-02-13 15:42:38: (ychliu.snf.stanford.edu)
31: Problem ebeam 2001-02-13 15:43:12: High dose causes problem. (ychliu.snf.stanford.edu)
32: Shutdown ebeam 2001-02-18 09:32:42: Low Beam Current and IP3 kicked off. (shott.snf.stanford.edu)
33: Re: Problem ebeam 2001-02-12 08:45:18: beam current 0.06nA (usually 3nA) (jerabek.snf.stanford.edu)
34: Re: Problem ebeam 2001-02-12 12:07:57: error code 707 (jerabek.snf.stanford.edu)
35: Re: Problem ebeam 2001-02-13 15:42:38: (jerabek.snf.stanford.edu)
36: Re: Problem ebeam 2001-02-13 15:43:12: High dose causes problem. (jerabek.snf.stanford.edu)
37: Re: Shutdown ebeam 2001-02-18 09:32:42: Low Beam Current and IP3 kicked off. (jerabek.snf.stanford.edu)
38: Problem ebeam 2001-02-20 18:06:49: unstable beam current (tombler.snf.stanford.edu)
39: Problem ebeam 2001-02-21 10:36:07: unable to unload the cartridge (ylin.snf.stanford.edu)
40: Re: Problem ebeam 2001-02-21 10:36:07: clear problem (martinez.snf.stanford.edu)
41: Re: Problem ebeam 2001-02-20 18:06:49: unstable beam current (jerabek.snf.stanford.edu)
42: Problem ebeam 2001-02-24 17:42:50: Low beam current, wafer stuck (ychliu.snf.stanford.edu)
43: Re: Problem ebeam 2001-02-24 17:42:50: Low beam current, wafer stuck (jerabek.snf.stanford.edu)
44: Problem ebeam 2001-03-03 14:01:07: ebeam have some problem (707, ...) (ylin.snf.stanford.edu)
45: Re: Problem ebeam 2001-03-03 14:01:07: ebeam have some problem (707, ...) (jerabek.snf.stanford.edu)
46: Problem ebeam 2001-03-04 15:23:42: unable to load cassette 7 (ylin.snf.stanford.edu)
47: Re: Problem ebeam 2001-03-04 15:23:42: unable to load cassette 7 (jerabek.snf.stanford.edu)
48: Problem ebeam 2001-03-08 13:50:10: error 1002 (tombler.snf.stanford.edu)
49: Problem ebeam 2001-03-08 15:12:12: EBCP 602 Error for cassette 10 (piscanie.snf.stanford.edu)
50: Re: Problem ebeam 2001-03-08 15:12:12: EBCP 602 Error for cassette 10 (Paul Jerabek)
51: Re: Problem ebeam 2001-03-08 13:50:10: error 1002 (jerabek.snf.stanford.edu)
52: Re: Problem ebeam 2001-03-08 15:12:12: EBCP 602 Error for cassette 10 (jerabek.snf.stanford.edu)
53: Problem ebeam 2001-03-29 18:24:49: 1002 error (greene.snf.stanford.edu)
54: Re: Problem ebeam 2001-03-29 18:24:49: 1002 error (jerabek.snf.stanford.edu)
55: Re: Problem ebeam 2001-03-29 18:24:49: 1002 error (Paul Jerabek)
56: Problem ebeam 2001-04-06 12:00:05: 1002 error (greene.snf.stanford.edu)
57: Re: Problem ebeam 2001-04-06 12:00:05: 1002 error (Paul Jerabek)
58: Problem ebeam 2001-04-10 20:36:15: no beam current (tkramer.snf.stanford.edu)
59: Re: Problem ebeam 2001-04-10 20:36:15: no beam current (Paul Jerabek)
60: Re: Problem ebeam 2001-04-06 12:00:05: 1002 error (jerabek.snf.stanford.edu)
61: Re: Problem ebeam 2001-04-10 20:36:15: no beam current (jerabek.snf.stanford.edu)
62: Problem ebeam 2001-04-22 20:25:14: load/unload and other problems (piscanie.snf.stanford.edu)
63: Re: Problem ebeam 2001-04-22 20:25:14: load/unload and other problems (jerabek.snf.stanford.edu)
64: Problem ebeam 2001-04-26 20:13:14: Cassette in Magazine (jiencao.snf.stanford.edu)
65: Re: Problem ebeam 2001-04-26 20:13:14: Cassette in Magazine (jerabek.snf.stanford.edu)
66: Problem ebeam 2001-05-02 21:58:41: Magazine stuck. Cassette #10 and my wafer stuck in load chamber. (amol.snf.stanford.edu)
67: Re: Problem ebeam 2001-05-02 21:58:41: Magazine stuck. Cassette #10 and my wafer stuck in load chamber. (jerabek.snf.stanford.edu)
68: Problem ebeam 2001-05-28 15:09:24: console not responding (jwynn.snf.stanford.edu)
69: Re: Problem ebeam 2001-05-28 15:09:24: console not responding (jerabek.snf.stanford.edu)
70: Comment ebeam 2001-06-02 14:16:32: Load/unload (piscanie.snf.stanford.edu)
71: Problem ebeam 2001-06-03 01:12:51: cassette loader problem (takeuchi.snf.stanford.edu)
72: Re: Problem ebeam 2001-06-03 01:12:51: cassette loader problem (jerabek.snf.stanford.edu)
73: Problem ebeam 2001-06-05 19:23:44: (ylin.snf.stanford.edu)
74: Re: Problem ebeam 2001-06-05 19:23:44: ? (jerabek.snf.stanford.edu)
75: Problem ebeam 2001-06-11 00:36:07: IB current near zero (piscanie.snf.stanford.edu)
76: Re: Problem ebeam 2001-06-11 00:36:07: IB current near zero (jerabek.snf.stanford.edu)
77: Problem ebeam 2001-06-28 00:32:50: beam current low (takeuchi.snf.stanford.edu)
78: Re: Problem ebeam 2001-06-28 00:32:50: beam current low (jerabek.snf.stanford.edu)
79: Problem ebeam 2001-07-10 18:32:35: unable to lod or uld wafer (err=602) (ylin.snf.stanford.edu)
80: Comment ebeam 2001-07-11 03:09:42: lod and uld problems (piscanie.snf.stanford.edu)
81: Re: Problem ebeam 2001-07-10 18:32:35: unable to lod or uld wafer (err=602) (jerabek.snf.stanford.edu)
82: Problem ebeam 2001-07-11 09:35:58: (yunli.snf.stanford.edu)
83: Re: Problem ebeam 2001-07-11 09:35:58: (jerabek.snf.stanford.edu)
84: Problem ebeam 2001-07-22 19:11:24: ebeam system need to be rebooted (yunli.snf.stanford.edu)
85: Re: Problem ebeam 2001-07-22 19:11:24: ebeam system need to be rebooted (jerabek.snf.stanford.edu)
86: Re: Problem ebeam 2001-07-22 19:11:24: ebeam system need to be rebooted (jerabek.snf.stanford.edu)
87: Problem ebeam 2001-07-23 20:28:34: (fshi.snf.stanford.edu)
88: Problem ebeam 2001-08-13 06:49:51: Beam Current (piscanie.snf.stanford.edu)
89: Problem ebeam 2001-08-13 19:03:18: Beam Current Restored (greene.snf.stanford.edu)
90: Re: Problem ebeam 2001-08-13 06:49:51: Beam Current (shott.snf.stanford.edu)
91: Re: Problem ebeam 2001-08-13 19:03:18: Beam Current Restored (shott.snf.stanford.edu)
92: Re: Problem ebeam 2001-07-23 20:28:34: (shott.snf.stanford.edu)
93: Re: Problem ebeam 2001-08-13 19:03:18: Beam Current Restored (John Shott)
94: Problem ebeam 2001-08-28 23:47:23: The magazine can't move (pclin.snf.stanford.edu)
95: Shutdown ebeam 2001-08-29 10:13:55: (jerabek.snf.stanford.edu)
96: Re: Problem ebeam 2001-08-28 23:47:23: The magazine can't move (jerabek.snf.stanford.edu)
97: Re: Shutdown ebeam 2001-08-29 10:13:55: (jerabek.snf.stanford.edu)
98: Shutdown ebeam 2001-08-29 12:21:59: (jerabek.snf.stanford.edu)
99: Problem ebeam 2002-01-09 09:18:16: 1-9-2002 woeking on the problem (jwc.snf.stanford.edu)

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