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Messages 0xx
01:
Epi is working
(
Robin King
)
02:
Epi reservation
(
Nick Lindert
)
03:
Re: Epi reservation
(
Robin King
)
04:
reservation cancellation
(
Robin King
)
05:
Epi Monday
(
Nick Lindert
)
06:
reservatin' for epi
(
Aaron Partridge
)
07:
Low temp epi growth
(
Nick Lindert
)
08:
Epi shutdown
(
Robin King
)
09:
Monday Epi Reservation
(
Nick Lindert
)
10:
Epi use today
(
Nick Lindert
)
11:
epi Tues night
(
Nick Lindert
)
12:
Re: epi Tues night
(
Keith Gaul
)
13:
epi tonite
(
Nick Lindert
)
14:
Tube condition
(
Keith Gaul
)
15:
epi tonite
(
Nick Lindert
)
16:
OK to run
(
Robin King
)
17:
thurs nite epi reservation
(
Nick Lindert
)
18:
Re: thurs nite epi reservation
(
Robin King
)
19:
Re: thurs nite epi reservation
(
Nick Lindert
)
20:
epi use on Monday
(
Nick Lindert
)
21:
epi wednesday
(
Nick Lindert
)
22:
HCl Problem -
(
Keith Gaul
)
23:
Epi ready for use
(
Keith Gaul
)
24:
Epi looks good
(
Nick Lindert
)
25:
epi weirdness
(
Nick Lindert
)
26:
germane source
(
Dan Aubertine
)
27:
please respond re: doped epi
(
Robin King
)
28:
tube change
(
Ray Seymour
)
29:
Tube change on 3/7/01
(
Ray Seymour
)
30:
system update
(
Ray Seymour
)
31:
wafer wand
(
Ray Seymour
)
32:
shutdown progress
(
Ray Seymour
)
33:
EPI repair status
(
Dick Crane
)
34:
Toxic gas shutdown Aug. 6
(
Dick Crane
)
35:
Toxic gas tests complete
(
Dick Crane
)
36:
System status
(
Dick Crane
)
37:
HCL Leak Check
(
Ray Seymour
)
38:
diclor line
(
Ray Seymour
)
39:
HCL cylinder
(
Ray Seymour
)
40:
HCL change
(
Ray Seymour
)
41:
Repair update
(
Dick Crane
)
42:
epi repair date
(
Dick Crane
)
43:
epi backup service
(
Dick Crane
)
44:
epi repair update
(
Dick Crane
)
45:
EPI testing
(
Dick Crane
)
46:
Re: EPI testing
(
maurice stevens
)
47:
Epi Free Wed Afternoon
(
Michael S. Bartsch
)
48:
cancelled afternoon res.
(
Rob Norris Candler
)
49:
cancelled res.
(
Rob Norris Candler
)
50:
Cancel res for Monday 3/4
(
hlkung.stanford.edu
)
51:
EPI temp uniformity repair
(
Dick Crane
)
52:
Canceling EPI time Friday 10-4
(
Helen L. Kung
)
53:
EPI update
(
Dick Crane
)
54:
HCl ready to use
(
Dick Crane
)
55:
Wafer stuck (?) in epi
(
Michael S. Bartsch
)
56:
Nevermind...
(
Michael S. Bartsch
)
57:
Shut Down
(
Michael S. Bartsch
)
58:
Epi Up
(
Michael S. Bartsch
)
59:
wafer left in left load lock
(
hlkung.stanford.edu
)
60:
SiGe graded buffer layers
(
Dan Aubertine
)
61:
Re: DCS]
(
Mike Dickey
)
62:
Re: Shutdown epi 2002-03-28 12:13:02: DCS sensor in gas vault alarming]
(
Ray Seymour
)
63:
Re: Shutdown epi 2002-03-28 12:13:02: DCS sensor in gas vault alarming]
(
Maurice Stevens
)
64:
epi down/ leak checking
(
Maurice Stevens
)
65:
done w/epi for today
(
Rob Norris Candler
)
66:
Sorry for the very late notice, but I won't be needing my epi time
(
Rob Norris Candler
)
67:
Finished epi early, afternoon is now available
(
Rob Norris Candler
)
68:
not using my time
(
auber.stanford.edu
)
69:
epi free today -- wafers not ready. sorry for late notice
(
Aaron Partridge
)
70:
Loss of house vacuum on Monday6-17-02
(
Ted Berg
)
71:
Re: Loss of house vacuum on Monday6-17-02]
(
Ted Berg
)
72:
Ge & SiGe
(
Gary Yama
)
73:
Low Temp SiGe growth?
(
Dan Aubertine
)
74:
HCL Change
(
Ray Seymour
)
75:
HCL
(
Ray Seymour
)
76:
EPI Progress report
(
Dick Crane
)
77:
Germane Source
(
auber.stanford.edu
)
78:
Reservation cancellation
(
Ted Berg
)
79:
Tube change
(
Ted Berg
)
80:
Tube replacement
(
Ted Berg
)
81:
Epi up
(
Maurice Stevens
)
82:
Re: outside source for SiGe (30% Ge) on Si?
(
Jim McVittie
)
83:
Epi Process Poll
(
Jim McVittie
)
84:
Sump Pump is dead for epi
(
Ted Berg
)
85:
Re: Comment epi 2003-01-09 13:15:35: HCl bottle changed friday/down over weekend]
(
Ray Seymour
)
86:
HCL change
(
Mike Dickey
)
88:
Re: cancelled res. Monday 1300-1900
(
Benjamin Chui
)
89:
This weekend...No 1% PH3
(
Maurice Stevens
)
90:
epi available monday 4/14
(
Rob Norris Candler
)
91:
dropped 4/29 reservation
(
Rob Norris Candler
)
92:
epi shut down for tube clean
(
Dick Crane
)
93:
Epi Tube Pull on Tues
(
Maurice Stevens
)
94:
lightly doped N type Si recipe
(
Yahong Yao
)
95:
Status if Epi
(
Ted Berg
)
96:
epi staus...yellow
(
Maurice Stevens
)
97:
EPI STATUS...YELLOW
(
Maurice Stevens
)
98:
grabbing of epi-time
(
Steffen Walker
)
99:
epi open 18:00-- today
(
Yahong Yao
)
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