Messages 0xx


01: test -- please ignore (Troy Wu)
02: Shutdown epi: Testing epi after repair ((none))
03: Problem epi: Test Problem ((none))
04: Problem Clear epi: Test Clear ((none))
05: Problem epi: EPI facility status light is on red (yiching.snf.stanford.edu)
06: Problem Clear epi: Light is off now (gaul.snf.stanford.edu)
07: Problem epi: wafer might not be turning, bailed out of run (aaronp.snf.stanford.edu)
08: Problem Clear epi: Rotation looks fine to me (gaul.snf.stanford.edu)
09: Problem epi: Epi status light is red (amol.snf.stanford.edu)
10: Problem Clear epi: reset temp controller in basement (gaul.snf.stanford.edu)
11: Problem epi: epi facility red light (yiching.snf.stanford.edu)
12: Problem Clear epi: reset t/c (gaul.snf.stanford.edu)
13: Problem epi: tube very dirty!!! (aaronp.snf.stanford.edu)
14: Problem epi: RED facilities light (aaronp.snf.stanford.edu)
15: Problem Clear epi: Fixed (gaul.snf.stanford.edu)
16: Problem epi: DCS out of range (yiching.snf.stanford.edu)
17: Problem Clear epi: Looks O.K. Now (gaul.snf.stanford.edu)
18: Shutdown epi: No HCl- (kalavade.snf.stanford.edu)
19: Shutdown Clear epi: Bottle change completed (gaul.snf.stanford.edu)
20: Shutdown epi: thick depositions on tube (king.snf.stanford.edu)
21: Problem Clear epi: Shutdown to clean (gaul.snf.stanford.edu)
22: Shutdown Clear epi: (king.snf.stanford.edu)
23: Problem epi: left load dock doesn't see all wafers (yiching.snf.stanford.edu)
24: Problem Clear epi: Adjusted wafer sensor (gaul.snf.stanford.edu)
25: Problem epi: epi facility light ON (yiching.snf.stanford.edu)
26: Problem Clear epi: reset t/c indicator in basement (gaul.snf.stanford.edu)
27: Problem epi: filament sagging, lamp overpower (yiching.snf.stanford.edu)
28: Problem Clear epi: O.K. to run (gaul.snf.stanford.edu)
29: Problem epi: Lower lamp (gaul.snf.stanford.edu)
30: Problem epi: Epi H2 alarm (lindert.snf.stanford.edu)
31: Shutdown epi: shutdown for h2 alarm (lindert.snf.stanford.edu)
32: Problem Clear epi: Shutdown due to the problem (gaul.snf.stanford.edu)
33: Shutdown epi: Susceptor problem (gaul.snf.stanford.edu)
34: Shutdown Clear epi: reset h2 alarm panel (gaul.snf.stanford.edu)
35: Shutdown Clear epi: Susceptor is operational again (gaul.snf.stanford.edu)
36: Problem epi: epi facility red light on (yiching.snf.stanford.edu)
37: Problem Clear epi: reset t/c (gaul.snf.stanford.edu)
38: Shutdown epi: High HCl not reaching set point (gaul.snf.stanford.edu)
39: Problem epi: wafer pieces in exchange chamber (yiching.snf.stanford.edu)
40: Shutdown Clear epi: Replaced High Flow HCl MFC (gaul.snf.stanford.edu)
41: Problem Clear epi: wafer pieces were removed (king.snf.stanford.edu)
42: Problem epi: recipes won't load in AUTO mode (king.snf.stanford.edu)
43: Problem epi: DCS level fluctuates a lot (yiching.snf.stanford.edu)
48: Problem epi: problem sending right elevator home (auber.snf.stanford.edu)
49: Shutdown epi: Dead Monitor (gaul.snf.stanford.edu)
50: Shutdown Clear epi: fixed (seymour.snf.stanford.edu)
51: Problem epi: temp range error on startup (auber.snf.stanford.edu)
52: Problem Clear epi: set panel to workstation (gaul.snf.stanford.edu)
53: Problem Clear epi: reset the system (gaul.snf.stanford.edu)
54: Problem epi: Suseptor, wand problem (king.snf.stanford.edu)
55: Problem Clear epi: checks ok now (seymour.snf.stanford.edu)
56: Problem Clear epi: (seymour.snf.stanford.edu)
57: Problem epi: P inject may be +6 sccm off. FYI (king.snf.stanford.edu)
58: Problem epi: Facilities red light is on (Bill Murray)
59: Problem Clear epi: fac light off now (seymour.snf.stanford.edu)
60: Problem Clear epi: (seymour.snf.stanford.edu)
61: Shutdown epi: H2 levels read 4ppm (aaronp.snf.stanford.edu)
62: Shutdown epi: the H2 sensors have drifted from zero no leak (seymour.snf.stanford.edu)
63: Shutdown epi: Gas monitoring down (ericp.snf.stanford.edu)
64: Shutdown epi: Gas monitoring down (rcrane.snf.stanford.edu)
65: Problem epi: epi status light not lit (amol.snf.stanford.edu)
66: Problem epi: reset the scrubber makeup water alarm (seymour.snf.stanford.edu)
67: Comment epi: Germine cylinder change on Friday (seymour.snf.stanford.edu)
68: Comment epi: Germaine cylinder change on Friday AM (seymour.snf.stanford.edu)
69: Shutdown epi: No EPI due to HCl gas cabinet leak (rcrane.snf.stanford.edu)
70: HCl regulator failure (Dick Crane)
71: Re: Shutdown epi 2000-12-08 19:05:35: No EPI due to HCl gas cabinet leak (wheeler.snf.stanford.edu)
72: Shutdown epi 2001-01-12 06:41:48: (wheeler.snf.stanford.edu)
73: Re: Shutdown epi 2001-01-12 06:41:48: (wheeler.snf.stanford.edu)
74: Problem epi 2001-01-21 12:02:32: Consult staff first; marginal tube (king.snf.stanford.edu)
75: Problem epi 2001-01-21 12:09:41: Consult staff first, marginal tube (king.snf.stanford.edu)
76: Re: Problem epi 2001-01-21 12:02:32: Consult staff first; marginal tube (seymour.snf.stanford.edu)
77: Comment epi 2001-01-22 10:49:50: burnbox heating up (seymour.snf.stanford.edu)
78: Problem epi 2001-01-26 09:33:58: wafer stuck in chamber (yiching.snf.stanford.edu)
79: Problem epi 2001-01-29 12:51:03: Sudden complete crash hardware+software (auber.snf.stanford.edu)
80: Shutdown epi 2001-01-29 12:54:52: sudden complete shutdown (auber.snf.stanford.edu)
81: Re: Shutdown epi 2001-01-29 12:54:52: reset system (seymour.snf.stanford.edu)
82: Re: Problem epi 2001-01-29 12:51:03: Sudden complete crash hardware+software (seymour.snf.stanford.edu)
83: Re: Problem epi 2001-01-26 09:33:58: wafer stuck in chamber no longer (seymour.snf.stanford.edu)
84: Shutdown epi 2001-02-20 12:31:25: No H2 flow in gas panel (king.snf.stanford.edu)
85: Re: Shutdown epi 2001-02-20 12:31:25: No H2 flow in gas panel (king.snf.stanford.edu)
86: Shutdown epi 2001-03-06 11:43:11: tube change needed (seymour.snf.stanford.edu)
87: Re: Shutdown epi 2001-03-06 11:43:11: tube change completed (seymour.snf.stanford.edu)
88: Shutdown epi 2001-03-07 18:43:42: new tube installed (king.snf.stanford.edu)
89: Re: Problem epi 2001-01-21 12:09:41: Consult staff first, marginal tube (seymour.snf.stanford.edu)
90: Re: Shutdown epi 2001-03-07 18:43:42: new tube installed (king.snf.stanford.edu)
91: Problem epi 2001-03-22 14:35:54: needs more time at temp (king.snf.stanford.edu)
92: Shutdown epi 2001-04-09 08:39:04: HCL Pressure reduction testing (seymour.snf.stanford.edu)
93: Re: Shutdown epi 2001-04-09 08:39:04: HCL Pressure reduction testing (seymour.snf.stanford.edu)
94: Re: Problem epi 2001-03-22 14:35:54: needs more time at temp (seymour.snf.stanford.edu)
95: Problem epi 2001-04-16 07:59:33: system needs etch and coat (seymour.snf.stanford.edu)
96: Shutdown epi 2001-04-18 16:04:33: HCl panel leak (seymour.snf.stanford.edu)
97: Re: Shutdown epi 2001-04-18 16:04:33: HCl panel leak (seymour.snf.stanford.edu)
98: Comment epi 2001-05-25 17:32:59: etched and coated. ready to use (aaronp.snf.stanford.edu)
99: Re: Problem epi 2001-04-16 07:59:33: system needs etch and coat (seymour.snf.stanford.edu)