Messages 18xx


00: Comment epi SNF 2008-12-16 10:10:03: update 12/16/08 (maurice.snf.stanford.edu)
01: Shutdown epi SNF 2009-01-08 11:16:33: red facilities light on (maurice.snf.stanford.edu)
02: Re: Shutdown epi SNF 2009-01-08 11:16:33: red facilities light on (shott.snf.stanford.edu)
03: Comment epi SNF 2009-01-08 17:22:16: All process lines in tool drained (maurice.snf.stanford.edu)
04: Comment epi SNF 2009-01-09 17:52:01: leak checks with gases off (maurice.snf.stanford.edu)
05: Comment epi SNF 2009-01-13 17:55:24: Up[date (maurice.snf.stanford.edu)
06: Shutdown epi SNF 2009-02-02 11:38:28: tube pulled because of flaking (maurice.snf.stanford.edu)
07: Comment epi SNF 2009-02-04 08:31:05: Chamber (mdickey.snf.stanford.edu)
08: Comment epi SNF 2009-02-05 10:40:43: Leak checking (mdickey.snf.stanford.edu)
09: Comment epi SNF 2009-02-05 14:00:43: LEAK (mdickey.snf.stanford.edu)
10: Comment epi SNF 2009-02-06 13:39:21: leaky checky (mdickey.snf.stanford.edu)
11: Comment epi SNF 2009-02-09 13:48:47: Leak (mdickey.snf.stanford.edu)
12: Comment epi SNF 2009-02-18 10:32:50: update (maurice.snf.stanford.edu)
13: Comment epi SNF 2009-02-23 08:15:45: chamber repair (mdickey.snf.stanford.edu)
14: Comment epi SNF 2010-04-16 07:37:02: Shut down for Move (tberg.snf.stanford.edu)
15: Re: Problem epi SNF 2008-09-05 12:59:02: down stream lower plate (shott.snf.stanford.edu)
16: Re: Problem epi SNF 2008-10-08 17:39:21: needs qual run (shott.snf.stanford.edu)
17: Re: Shutdown epi SNF 2008-10-09 17:17:11: test bad (shott.snf.stanford.edu)
18: Re: Shutdown epi SNF 2008-10-28 15:35:52: ran 1um SiH4 processss... spotty dep (shott.snf.stanford.edu)
19: Re: Problem epi SNF 2008-10-30 14:59:59: Leakup time changed to one minute (shott.snf.stanford.edu)
20: Re: Problem epi SNF 2008-12-08 06:01:41: Germane (shott.snf.stanford.edu)
21: Re: Shutdown epi SNF 2009-02-02 11:38:28: tube pulled because of flaking (shott.snf.stanford.edu)
22: Re: Problem epi SNF 2008-02-15 10:06:29: down stream reflector, gold flaking off (shott.snf.stanford.edu)
23: changing 1% B2H6 tomorrow morning (Ted Berg)
24: first BADGER (Ted Berg)
25: H2 regulator Issue (Ted Berg)
26: Still running in cold idle (Ted Berg)