Messages 0xx


01: Comment evalign: if backside align won't allow you to refocus on the wafer during "adjust wafer" step, use "maskcheck" to unload wafer and focus on mask again, it will stay reasonably clear when you re-load ((none))
02: Problem evalign: if backside align won't allow you to focus during "adjust wafer" step, use "maskcheck" to unload substrate and re-focus on the mask, it will stay reasonably clear when you reload wafer ((none))
03: Problem Clear evalign: ((none))
04: Problem Clear evalign: ((none))
05: Problem evalign: vacuum sensor error (sanli.snf.stanford.edu)
06: Problem Clear evalign: (martinez.snf.stanford.edu)
07: Problem Clear evalign: (martinez.snf.stanford.edu)
08: Problem evalign: backside align won't focus adjust (pruitt.snf.stanford.edu)
09: Problem Clear evalign: system is up (mahnaz.snf.stanford.edu)
10: Problem evalign: vacuum is not working! (yunli.snf.stanford.edu)
11: Problem evalign: vacuum won't hold mask! (emc.snf.stanford.edu)
12: Problem Clear evalign: vacuum working fine (prisbe.snf.stanford.edu)
13: Problem Clear evalign: vacuum working¨ (prisbe.snf.stanford.edu)
14: Problem evalign: (lian.snf.stanford.edu)
15: Problem evalign: (lian.snf.stanford.edu)
16: Problem evalign: eyepieces don't move (liuhao.snf.stanford.edu)
17: Problem Clear evalign: (martinez.snf.stanford.edu)
18: Problem Clear evalign: (martinez.snf.stanford.edu)
19: Shutdown evalign: endpositio reached (franklin.snf.stanford.edu)
20: Problem Clear evalign: (vilanova.snf.stanford.edu)
21: Shutdown Clear evalign: (vilanova.snf.stanford.edu)
22: Problem evalign: locked up in middle of process (jac.snf.stanford.edu)
23: Problem evalign: as above (jac.snf.stanford.edu)
24: Problem evalign: system cannot initialize (sanli.snf.stanford.edu)
25: Problem Clear evalign: (martinez.snf.stanford.edu)
26: Problem Clear evalign: (martinez.snf.stanford.edu)
27: Problem evalign: locked up after trying to park tray (dtlee.snf.stanford.edu)
28: Problem Clear evalign: (martinez.snf.stanford.edu)
29: Problem evalign: evalign system unstable (takamura.snf.stanford.edu)
30: Problem Clear evalign: (martinez.snf.stanford.edu)
31: Problem evalign: vacuum sensor error (pzwahlen.snf.stanford.edu)
32: Problem evalign: left in ill-defined state (dbr.snf.stanford.edu)
33: Problem Clear evalign: (martinez.snf.stanford.edu)
34: Problem Clear evalign: (martinez.snf.stanford.edu)
35: Problem evalign: Y-micrometer mis-thread - stuck (hansen.snf.stanford.edu)
36: Problem Clear evalign: (vilanova.snf.stanford.edu)
37: Shutdown evalign: broken macrometer (mahnaz.snf.stanford.edu)
38: Shutdown Clear evalign: (martinez.snf.stanford.edu)
39: Problem evalign: End position error (amos.snf.stanford.edu)
40: Problem Clear evalign: (vilanova.snf.stanford.edu)
41: Problem Clear evalign: (vilanova.snf.stanford.edu)
42: Problem evalign: (rmzapata.snf.stanford.edu)
43: Problem evalign: Reciepe: Backside alignment Problem; At the final "adjust wafer" step thesystem will not enable "scan optics", to make final wafer to pattern adjustments for final alignment. (rmzapata.snf.stanford.edu)
44: Shutdown evalign: right microscope eyepiece low (aaronp.snf.stanford.edu)
45: Shutdown evalign: clear (mahnaz.snf.stanford.edu)
46: Shutdown evalign: (mahnaz.snf.stanford.edu)
47: Shutdown Clear evalign: (bmurray.snf.stanford.edu)
48: Shutdown Clear evalign: (bmurray.snf.stanford.edu)
49: Shutdown Clear evalign: (bmurray.snf.stanford.edu)
50: Problem Clear evalign: (bmurray.snf.stanford.edu)
51: Problem Clear evalign: (bmurray.snf.stanford.edu)
52: Problem evalign: EV Aligner (mcp.snf.stanford.edu)
53: Problem Clear evalign: (vilanova.snf.stanford.edu)
54: Problem evalign: forgot to logout - locked up (dbr.snf.stanford.edu)
55: Comment evalign: (martinez.snf.stanford.edu)
56: Problem evalign: EV Aligner (mcp.snf.stanford.edu)
57: Comment evalign: (martinez.snf.stanford.edu)
58: Comment evalign: (martinez.snf.stanford.edu)
59: Comment evalign: (jdfraser.snf.stanford.edu)
62: Problem evalign: Theta micrometer in bad shape! (ericp.snf.stanford.edu)
63: Shutdown evalign: broken theta micrometer (mahnaz.snf.stanford.edu)
64: Problem Clear evalign: (vilanova.snf.stanford.edu)
65: Shutdown Clear evalign: (vilanova.snf.stanford.edu)
66: Shutdown evalign: loader blocked (franklin.snf.stanford.edu)
67: Shutdown evalign: clear ev620 (martinez.snf.stanford.edu)
68: Problem evalign: ev align in undefined state (davehong.snf.stanford.edu)
69: Shutdown evalign: undefined state (davehong.snf.stanford.edu)
70: Problem evalign: ev align in undefined state (vilanova.snf.stanford.edu)
71: Shutdown evalign: System Initialized , ok to use (vilanova.snf.stanford.edu)
72: Comment evalign: Ev is available (mahnaz.snf.stanford.edu)
73: Shutdown evalign 2001-01-16 12:11:57: optics stuck (lindaw.snf.stanford.edu)
74: Re: Shutdown evalign 2001-01-16 12:11:57: clear evaligner (martinez.snf.stanford.edu)
75: Problem evalign 2001-01-30 21:24:04: evalign (mcp.snf.stanford.edu)
76: Re: Problem evalign 2001-01-30 21:24:04: evalign (vilanova.snf.stanford.edu)
77: Comment evalign 2001-02-11 10:04:49: (igonzalez.snf.stanford.edu)
78: Problem evalign 2001-02-11 10:15:45: (igonzalez.snf.stanford.edu)
79: Problem evalign 2001-02-11 20:12:38: wedge not working (ericp.snf.stanford.edu)
80: Re: Problem evalign 2001-02-11 10:15:45: (vilanova.snf.stanford.edu)
81: Re: Problem evalign 2001-02-11 20:12:38: wedge not working (vilanova.snf.stanford.edu)
82: Problem evalign 2001-02-12 13:09:45: vacuum sensor error (mahnaz.snf.stanford.edu)
83: Shutdown evalign 2001-02-14 09:31:17: vacuum sensor error-cannot load mask (dhelqaq.snf.stanford.edu)
84: Re: Shutdown evalign 2001-02-14 09:31:17: up (martinez.snf.stanford.edu)
85: Re: Problem evalign 2001-02-12 13:09:45: up (martinez.snf.stanford.edu)
86: Problem evalign 2001-03-13 01:19:51: (dopalsky.snf.stanford.edu)
87: Problem evalign 2001-03-13 01:20:36: vacuum sensor errpr (dopalsky.snf.stanford.edu)
88: Re: Problem evalign 2001-03-13 01:20:36: vacuum sensor errpr (vilanova.snf.stanford.edu)
89: Re: Problem evalign 2001-03-13 01:19:51: Tested it Working Ok (vilanova.snf.stanford.edu)
90: Shutdown evalign 2001-03-19 02:43:32: vacuum sensor error-no mask load (hector.snf.stanford.edu)
91: Re: Shutdown evalign 2001-03-19 02:43:32: (martinez.snf.stanford.edu)
92: Shutdown evalign 2001-04-10 04:26:21: System in unknown state (mbadi.snf.stanford.edu)
93: Re: Shutdown evalign 2001-04-10 04:26:21: System in unknown state (vilanova.snf.stanford.edu)
94: Problem evalign 2001-05-01 15:40:47: exposure alarm (jonkurz.snf.stanford.edu)
95: Shutdown evalign 2001-05-01 18:48:34: lamp (martinez.snf.stanford.edu)
96: Re: Shutdown evalign 2001-05-01 18:48:34: lamp (martinez.snf.stanford.edu)
97: Re: Problem evalign 2001-05-01 15:40:47: exposure alarm (martinez.snf.stanford.edu)
98: Problem evalign 2001-05-18 17:36:22: EValign (mwalker.snf.stanford.edu)
99: Re: Problem evalign 2001-05-18 17:36:22: EValign (martinez.snf.stanford.edu)