Subject: Re: Shutdown evalign SNF 2012-10-11 17:06:44: Focus issue
From: gsosa@snf.stanford.edu

Reseated all PC boards and connectors. Tested at various separation gaps from 1 to 800
microns. Align gap responding properly now. Possibly a bit was stuck and align gap setting
not being interpreted correctly. Tested many times with mask and wafer  load/unload/expose.
Reset the tool many times. Align gap working correctly now. Please report if problem
returns