Subject: Shutdown evalign SNF 2012-10-11 17:06:44: Focus issue
From: gsosa@snf.stanford.edu

Unable to focus on mask and wafer at the same time with an align gap of 40um. Visually,
you can see a large gap between the bottom of the mask and the top of the wafer( about
1 to 2 mm) Tried hard resetting the computer and hardware and cleaning all critical
surfaces. Still no improvement. Need to investigate further.