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By: mahnaz.snf.stanford.edu
November 2000
Comment evbond: ready for use
February 2001
Re: Problem evbond 2001-01-15 21:23:07: alarm for flow
Re: Problem evbond 2001-01-02 19:00:42: Piece of glass found on wafer stack after bonding
Re: Problem evbond 2000-12-13 23:15:50: No Metal Gauge down (doesn't seem to be th battery)
Re: Problem evbond 2000-11-27 20:18:48: evbond top chuck temp erratic
May 2001
Re: Problem evbond 2001-03-23 17:07:33: No water coming out of the megasonic cleaner
Re: Problem evbond 2001-03-21 03:01:31: Megasonic Cleaner
July 2001
Re: Problem evbond 2001-06-13 16:08:58: Megasonic cleaner is not usable
September 2001
Re: Problem evbond 2001-09-21 12:25:49: grphite electrode of EV bonder
Re: Problem evbond 2001-09-21 18:58:17: graphite disk caused cracked bond
December 2001
Shutdown evbond 2001-12-07 10:38:14: Broken bond tool glass
Re: Shutdown evbond 2001-12-07 10:38:14: Broken bond tool glass
Re: Problem evbond 2001-12-06 17:56:25: cracked bond tool glass
May 2002
Re: Shutdown evbond 2002-05-21 16:59:08: damged chuck
Re: Problem evbond 2002-05-17 16:57:06: flag stuck
Re: Problem evbond 2002-05-16 21:30:48: Flag to left of wafer flat didn't fully withdraw
June 2002
Re: Shutdown evbond 2002-06-27 19:09:33: ev bonder multiple problems
October 2002
Re: Shutdown evbond 2002-10-25 11:32:22: Lamps will not come on during heat step
January 2003
Re: Problem evbond 2003-01-05 15:31:35: Megasonic cleaner does not work
March 2003
Re: Shutdown evbond 2003-02-28 15:27:38: Report Clear for evbond
Re: Problem evbond 2003-03-19 11:59:08: Report Clear for evbond
Re: Problem evbond 2003-03-21 16:52:57: Report Clear for evbond
May 2003
Problem evbond 2003-05-12 16:35:15: Report Problem for evbond
July 2003
Problem evbond 2003-07-17 13:21:01: Report Problem for evbond
August 2003
Comment evbond 2003-08-20 15:43:17: Report Comment for evbond
Comment evbond 2003-08-26 09:42:18: Report Comment for evbond
October 2003
Shutdown evbond 2003-10-08 08:38:05: Report Shutdown for evbond
Re: Problem evbond 2003-10-08 16:39:50: Report Clear for evbond
November 2003
Comment evbond 2003-11-06 11:36:01: Report Comment for evbond
Re: Problem evbond 2003-11-03 14:16:16: Bond Glass is broken
August 2004
Problem evbond SNF 2004-08-13 11:48:54: no temp.
September 2004
Shutdown evbond SNF 2004-09-16 11:17:19: top heater not coming on
Re: Shutdown evbond SNF 2004-09-20 14:26:11: top heater not working.
Re: Problem evbond SNF 2004-09-20 12:23:58: top heater doesn't work!
Re: Comment evbond SNF 2004-09-17 17:22:06:
Re: Problem evbond SNF 2004-09-08 00:05:41: flag didn't come out
Re: Shutdown evbond SNF 2004-09-22 08:15:28: Heater Again
May 2005
Problem evbond SNF 2005-05-03 08:32:10: top,left flag needs adjustments
March 2006
Problem evbond SNF 2006-03-20 16:13:39: Bad turbo pump
Shutdown evbond SNF 2006-03-29 08:54:41: broken si and glass in the chamber
Re: Problem evbond SNF 2006-03-20 16:13:39: Bad turbo pump
Re: Shutdown evbond SNF 2006-03-29 08:54:41: broken si and glass in the chamber
Re: Problem evbond SNF 2006-03-29 02:14:20: Evbond glass broken - please confirm with Mahnaz before use
April 2006
Problem evbond SNF 2006-04-10 10:08:00: report of top chuck heat issues
Shutdown evbond SNF 2006-04-10 11:02:40: lamps are not coming on
Re: Problem evbond SNF 2006-04-13 00:57:47: no curent no volage
July 2006
Re: Shutdown evbond SNF 2006-07-24 09:20:30: broken glass frame
August 2006
Shutdown evbond SNF 2006-08-07 11:50:34: air flow , did not finish the bond
Problem evbond SNF 2006-08-24 16:01:32: electrode needs to be replaced.
Shutdown evbond SNF 2006-08-25 15:58:07: top heater power will not come on
Shutdown evbond SNF 2006-08-29 15:37:47: not able to run because air flow
February 2007
Comment evbond SNF 2007-02-07 14:04:36: did training, tested system
June 2007
Comment evbond SNF 2007-06-08 13:45:40: chamber needs to be wiped down
October 2007
Comment evbond SNF 2007-10-24 15:17:10: ran an anodic and is beautiful.
November 2007
Comment evbond SNF 2007-11-07 16:38:33: anodic bond not possibile
December 2007
Re: Shutdown evbond SNF 2007-12-18 00:00:42: Cannot anodic bond!
January 2008
Comment evbond SNF 2008-01-16 10:25:38: Ran anodic bond, perfect.
Comment evbond SNF 2008-01-17 11:48:57: quartz plate
April 2008
Re: Problem evbond SNF 2008-04-07 16:12:55: flags not pulling out during anodic bond
May 2008
Re: Problem evbond SNF 2008-04-23 17:26:39: 3 tab glass broken
July 2008
Shutdown evbond SNF 2008-07-01 15:57:09: lamp is not coming on
Comment evbond SNF 2008-07-02 09:52:54: replacing the lamps
August 2008
Problem evbond SNF 2008-07-31 17:43:21: Chuck needs polish
Re: Problem evbond SNF 2008-07-31 17:43:21: Chuck needs polish
Re: Comment evbond SNF 2008-07-22 16:40:57: changed to steel.
Re: Comment evbond SNF 2008-07-16 15:04:46: Changed to Quartz
Problem evbond SNF 2008-08-13 09:30:35: second chuck out for polish
Shutdown evbond SNF 2008-08-13 10:04:58: due to exhaust work
October 2008
Comment evbond SNF 2008-10-03 13:53:56:
December 2008
Comment evbond SNF 2008-12-05 14:07:00: Replaced the Broken glass frame.
April 2009
Problem evbond SNF 2009-04-07 13:49:16: flag not being pulled
Comment evbond SNF 2009-04-08 14:39:16: Glass Frame Broken
May 2009
Comment evbond SNF 2009-04-30 17:01:38: ran anodic bond
Comment evbond SNF 2009-05-15 14:20:54: test
October 2009
Problem evbond SNF 2009-10-15 14:49:36: Flag issues
December 2009
Problem evbond SNF 2009-12-08 14:00:33: Flag stuck
March 2010
Comment evbond SNF 2010-03-01 10:11:34: update
Problem evbond SNF 2010-03-09 10:24:47: Megasonic cleaner
Re: Comment evbond SNF 2010-03-01 10:11:34: update
Re: Comment evbond SNF 2010-01-11 13:49:19: back to quartz plate per Use request.
Re: Comment evbond SNF 2009-12-09 08:20:45: Changed to steel
Re: Comment evbond SNF 2010-01-12 07:51:30: back to metal plate per user request.
Re: Comment evbond SNF 2010-01-25 10:19:57: back to quartz plate per user request.
Problem evbond SNF 2010-03-16 14:19:43: 2.10 graphite
May 2010
Problem evbond SNF 2010-05-12 14:43:01: two flags stuck
Problem evbond SNF 2010-05-13 10:53:55: Stressed glass frame
Re: Problem evbond SNF 2010-05-13 10:53:55: Stressed glass frame
June 2010
Problem evbond SNF 2010-06-22 14:25:52: Flag stuck
July 2010
Re: Problem evbond SNF 2010-06-22 14:25:52: Flag stuck
Comment evbond SNF 2010-07-29 15:03:16: Broken glass frame
August 2010
Problem evbond SNF 2010-08-04 16:24:04: flag not pulled
Comment evbond SNF 2010-08-16 10:08:46: Rehauling chuck, sent out to EVG
Problem evbond SNF 2010-08-17 15:26:50: quartz presser plate has a tiny crack
October 2010
Problem evbond SNF 2010-10-07 16:00:58: damged anodic graphite
Shutdown evbond SNF 2010-10-14 10:09:12: working on it
Comment evbond SNF 2010-10-14 15:44:37: quartz plate
November 2010
Re: Comment evbond SNF 2010-08-05 09:10:38: Changed to steel
Re: Comment evbond SNF 2010-10-04 11:20:51: Changed to Quartz
Re: Comment evbond SNF 2010-10-07 15:10:58: Changed to steel
Re: Comment evbond SNF 2010-10-14 15:44:37: quartz plate
Re: Comment evbond SNF 2010-10-11 11:03:52: Back To Steel plate.
Re: Comment evbond SNF 2010-10-19 12:36:23: Changed to Steel 10/19
Re: Comment evbond SNF 2010-10-20 14:37:52: Changed to Steel
Re: Comment evbond SNF 2010-10-22 15:14:20: Changed to Steel 10/22
Re: Comment evbond SNF 2010-10-25 13:48:39: Changed to Quartz 10/25
Re: Comment evbond SNF 2010-10-18 13:44:57: Back to quartz per user request
Re: Comment evbond SNF 2010-10-26 08:42:15: back to steel plate per user request.
Problem evbond SNF 2010-11-01 08:48:50: anodic graphite damaged
Re: Problem evbond SNF 2009-12-09 16:35:45: Flag stuck again
Re: Problem evbond SNF 2009-12-08 14:00:33: Flag stuck
Problem evbond SNF 2010-11-10 15:29:27: left flag did not pull out
Problem evbond SNF 2010-11-17 10:10:10: alignment shift
Problem evbond SNF 2010-11-17 10:19:40: Right flag puller not working
Comment evbond SNF 2010-11-19 15:15:39: quartz plate in
Re: Problem evbond SNF 2010-11-01 08:48:50: anodic graphite damaged
Re: Problem evbond SNF 2010-11-28 14:22:07: evbond situation
Re: Comment evbond SNF 2010-11-29 00:01:00: leaving enabled under comm. serv.
January 2011
Re: Comment evbond SNF 2010-10-29 14:37:22: system back to steel
Re: Comment evbond SNF 2010-11-01 14:44:30: system back to quartz.
Re: Comment evbond SNF 2010-11-05 13:43:46: System back to steel Plate
Re: Comment evbond SNF 2010-11-08 14:30:30: Changed to Quartz
Re: Problem evbond SNF 2010-11-10 15:29:27: left flag did not pull out
Re: Comment evbond SNF 2010-11-12 14:07:59: back to steel plate
Re: Comment evbond SNF 2010-11-15 15:05:54: System Back To Quartz
Re: Comment evbond SNF 2010-11-19 15:15:39: quartz plate in
Re: Comment evbond SNF 2010-11-24 10:44:09: Quartz Plate On Installed for the Long weekend
April 2011
Comment evbond SNF 2011-04-19 14:44:16: left Flag did not pull out and
Problem evbond SNF 2011-04-19 14:52:34: Noticed stress on the glass frame
May 2011
Re: Comment evbond SNF 2011-02-07 07:52:24: back to quartz per user request.
Re: Comment evbond SNF 2011-02-11 11:43:51: back to steel plate per user request.
Re: Comment evbond SNF 2011-02-14 13:38:28: back to quartz per user request
Re: Comment evbond SNF 2011-02-15 14:56:59: back to steel plate per users request.
Re: Comment evbond SNF 2011-02-16 11:22:56: Changed to Quartz
Re: Comment evbond SNF 2011-02-18 15:00:41: Changed to Steel 2/18
Re: Comment evbond SNF 2011-04-19 14:44:16: left Flag did not pull out and
Re: Comment evbond SNF 2011-02-28 09:25:08: Changed to Quartz
Re: Comment evbond SNF 2011-03-04 10:39:07: Back To Steel Plate
Re: Comment evbond SNF 2011-03-07 14:18:10: back to quartz Plate.
Re: Comment evbond SNF 2011-04-26 14:38:59: Replaced flags.
Comment evbond SNF 2011-05-06 11:04:36: the anodic test came out perfect.
June 2011
Problem evbond SNF 2011-06-17 14:32:57: graphite is damaged
Comment evbond SNF 2011-06-17 15:56:25: Graphite for anodic is good
Comment evbond SNF 2011-06-27 11:19:46: solid graphite has been ordered
Problem evbond SNF 2011-06-30 13:53:20: The right upper flag did not
July 2011
Re: Problem evbond SNF 2011-07-06 21:40:34: now all flags are sticking
Comment evbond SNF 2011-07-19 09:38:47: Solid graphite to arrive on Aug.9th
Problem evbond SNF 2011-07-29 12:11:56: Key board
Comment evbond SNF 2011-07-29 13:51:29: did training
Comment evbond SNF 2011-07-29 14:07:36: glas frame is stress
August 2011
Re: Problem evbond SNF 2011-06-17 14:32:57: graphite is damaged
Re: Comment evbond SNF 2011-06-17 15:56:25: Graphite for anodic is good
Re: Comment evbond SNF 2011-06-30 09:20:00: Back to quartz per Mahnaz Request
Re: Comment evbond SNF 2011-07-01 14:19:43: Changed to steel
Re: Comment evbond SNF 2011-07-06 08:13:11: Back To Quartz Per User Request
Re: Comment evbond SNF 2011-07-08 10:46:19: Changed to Steel 7/8
Re: Comment evbond SNF 2011-08-02 15:30:02: Status 8/2
Re: Comment evbond SNF 2011-07-29 07:44:33: Back TO Quartz Per Mahnaz Request
Shutdown evbond SNF 2011-08-17 10:46:14: lamps are not coming on
October 2011
Comment evbond SNF 2011-10-20 16:17:35: perfect anodic bond
November 2011
Comment evbond SNF 2011-11-02 14:01:32: did one anodic bond, looks very good.
February 2012
Re: Problem evbond SNF 2012-02-14 16:18:41: Update 2/14
Re: Comment evbond SNF 2011-07-19 09:38:47: Solid graphite to arrive on Aug.9th
Re: Comment evbond SNF 2011-07-29 13:51:29: did training
Re: Comment evbond SNF 2011-10-20 16:17:35: perfect anodic bond
Re: Comment evbond SNF 2011-11-02 14:01:32: did one anodic bond, looks very good.
Re: Comment evbond SNF 2011-11-21 09:07:20: Changed to Steel 11/21
Re: Comment evbond SNF 2011-12-03 16:35:27: Changed to Quartz 12/3
Re: Comment evbond SNF 2011-12-12 09:13:42: Changed to Steel
Problem evbond SNF 2012-02-17 15:04:17: Megasonic cleaner down
March 2012
Problem evbond SNF 2012-03-14 14:28:25: clamps are very stiff
May 2012
Comment evbond SNF 2012-05-15 15:30:14: Turbo pump was replaced but
August 2012
Problem evbond SNF 2012-08-15 14:56:34: right and left flags close to flat
September 2012
Problem evbond SNF 2012-09-05 14:47:34: flags did not pull out
Comment evbond SNF 2012-09-19 14:37:59: ran anodic looks good, glass frame a bit stressed.
Re: Comment evbond SNF 2012-07-06 14:32:06: Back to Quartz per User request.
Re: Comment evbond SNF 2012-07-11 07:43:31: Back To Steel Plate per User Request.
Re: Comment evbond SNF 2012-07-13 07:39:26: Back To Quartz Per User Request.
Re: Comment evbond SNF 2012-07-19 10:30:11: Back To Steel Plate Per User Request.
Re: Comment evbond SNF 2012-07-30 09:12:18: Back To Quartz Per User Request.
Re: Comment evbond SNF 2012-08-15 08:06:04: Back To Quartz Per Mahnaz Training Session
Re: Comment evbond SNF 2012-08-16 13:30:35: Back To Steel plate Mode per User Request.
Re: Comment evbond SNF 2012-08-30 15:44:32: Can I request for the quart plate (anodic bond) for this weekend?
Re: Comment evbond SNF 2012-08-31 11:25:13: Changed to Quartz 8/31
Re: Comment evbond SNF 2012-09-18 07:54:18: back to Steel Plate Per User Request.
November 2012
Comment evbond SNF 2012-11-28 14:24:35: New and improved chuck
Comment evbond SNF 2012-11-28 14:25:23: test the system
December 2012
Re: Problem evbond SNF 2012-12-08 12:14:27: Glass Alignment plate broken
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