Subject: Gryphon table rotation update
From: maurice stevens <>
Date: Fri, 02 Dec 2011 12:51:56 -0800

Gryphon went down last night with a process chamber table error.  The 
system is not sensing that the rotation is on and will not proceed to 
the deposition step.

Jim has spoken with Gryphon FS and they think we will have to open the 
process chamber to see what is going on (or not going on).  Just opening 
the system to atmosphere could require a couple of days to pump back 
down and burn in the targets.

We will update you all on Monday when we know more.


Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278