Gryphon went down last night with a process chamber table error. The
system is not sensing that the rotation is on and will not proceed to
the deposition step.
Jim has spoken with Gryphon FS and they think we will have to open the
process chamber to see what is going on (or not going on). Just opening
the system to atmosphere could require a couple of days to pump back
down and burn in the targets.
We will update you all on Monday when we know more.
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305