Messages 0xx


01: Problem gryphon: Cannot get it to transfer palettes from LMC to PMC. "LMC Failure: 11 Base Pressure" error onscreen several minutes after "exchange pallets" ((none))
02: Problem gryphon: lock chamber does not pump down. Can not exchange Palettes. ((none))
03: Comment gryphon: ((none))
04: Problem gryphon: pump down ((none))
05: Shutdown gryphon: LMC Failure: 47 Interlock 19: HiVac Pump. Was in that state when I came up to the machine. ((none))
06: Problem Clear gryphon: repair load chamber leaks (mramsey.snf.stanford.edu)
07: Shutdown Clear gryphon: repair leak (mramsey.snf.stanford.edu)
08: Problem gryphon: gryphon process chamber (king.snf.stanford.edu)
09: Problem Clear gryphon: regen cryo pump (mramsey.snf.stanford.edu)
10: Shutdown gryphon: process turbo (king.snf.stanford.edu)
11: Shutdown Clear gryphon: Repaired PMC (mramsey.snf.stanford.edu)
12: Problem gryphon: PPC error during deposit. Worked ok after "cal" was set to 3.7 as suggested by Mike Ramsey (narya.snf.stanford.edu)
13: Problem gryphon: Gryphon etch (king.snf.stanford.edu)
14: Problem Clear gryphon: reset PPC (mramsey.snf.stanford.edu)
15: Problem Clear gryphon: repaired (mramsey.snf.stanford.edu)
16: Problem gryphon: (lian.snf.stanford.edu)
17: Problem Clear gryphon: needs shut down (mramsey.snf.stanford.edu)
18: Shutdown gryphon: process chamber needs cleaning (mramsey.snf.stanford.edu)
19: Shutdown Clear gryphon: process chamber has been cleaned (mramsey.snf.stanford.edu)
20: Shutdown gryphon: PMC Initialization failure (true.snf.stanford.edu)
21: Shutdown Clear gryphon: reset controller (mramsey.snf.stanford.edu)
22: Shutdown gryphon: Gryphon is hung up (king.snf.stanford.edu)
23: Shutdown Clear gryphon: reset LMC (mramsey.snf.stanford.edu)
24: Shutdown gryphon: problem with elevator (shung.snf.stanford.edu)
25: Shutdown Clear gryphon: clear wafers (mramsey.snf.stanford.edu)
26: Problem gryphon: PMC Error (tuenishi.snf.stanford.edu)
27: Shutdown gryphon: PPC cathode is low (unusable) (king.snf.stanford.edu)
28: Shutdown Clear gryphon: repair logic error (mramsey.snf.stanford.edu)
29: Problem Clear gryphon: same (mramsey.snf.stanford.edu)
30: Problem gryphon: Etch recipe beam current high (amol.snf.stanford.edu)
31: Problem gryphon: Al target needs changing (king.snf.stanford.edu)
32: Shutdown gryphon: LMC failed to initialize (yiching.snf.stanford.edu)
33: Problem Clear gryphon: reset current (mramsey.snf.stanford.edu)
34: Shutdown Clear gryphon: (mramsey.snf.stanford.edu)
35: Problem Clear gryphon: changed target (mramsey.snf.stanford.edu)
36: Shutdown gryphon: lost transfer carrage in process chamber (mramsey.snf.stanford.edu)
37: Shutdown Clear gryphon: Shutdown Cleared (bmurray.snf.stanford.edu)
38: Problem gryphon: LMC failure loading wafers (hansen.snf.stanford.edu)
39: Shutdown gryphon: keyboard communication failure. (booth.snf.stanford.edu)
40: Problem Clear gryphon: This should have been a shutdown. (booth.snf.stanford.edu)
41: Shutdown Clear gryphon: Gryphon is working (king.snf.stanford.edu)
42: Problem gryphon: Gryphon cryopump (king.snf.stanford.edu)
43: Shutdown gryphon: Cryopump sounds bad. Needs regen.Date: Nov 16, 2000 9:26:52 AM (king.snf.stanford.edu)
44: Problem gryphon: Gryphon cryopump (king.snf.stanford.edu)
45: Shutdown gryphon: Cryopump sounds bad. Needs regen. (king.snf.stanford.edu)
46: Problem gryphon: Use with caution (king.snf.stanford.edu)
47: Problem gryphon: Use with caution (booth.snf.stanford.edu)
48: Problem gryphon 2000-12-21 23:00:41: (lian.snf.stanford.edu)
49: Re: Problem gryphon 2000-12-21 23:00:41: (booth.snf.stanford.edu)
50: Problem gryphon 2001-02-12 17:47:09: Argon control (king.snf.stanford.edu)
51: Problem gryphon 2001-02-12 18:40:43: hot chamber (king.snf.stanford.edu)
52: Shutdown gryphon 2001-02-22 09:51:26: regen cryopump (king.snf.stanford.edu)
53: Re: Shutdown gryphon 2001-02-22 09:51:26: regen completed (jhaydon.snf.stanford.edu)
54: Problem gryphon 2001-03-16 22:28:42: turbo failure (ibrahim.snf.stanford.edu)
55: Re: Problem gryphon 2001-03-16 22:28:42: turbo failure (jhaydon.snf.stanford.edu)
56: Shutdown gryphon 2001-04-14 21:58:44: wafers stuck in lock chamber (hopcroft.snf.stanford.edu)
57: Re: Shutdown gryphon 2001-04-14 21:58:44: wafers stuck in lock chamber (jhaydon.snf.stanford.edu)
58: Re: Problem gryphon 2001-02-12 18:40:43: hot chamber (jhaydon.snf.stanford.edu)
59: Comment gryphon 2001-04-19 11:56:17: gryphon (jhaydon.snf.stanford.edu)
60: Shutdown gryphon 2001-04-24 16:44:58: targets (jhaydon.snf.stanford.edu)
61: Re: Shutdown gryphon 2001-04-24 16:44:58: targets (jhaydon.snf.stanford.edu)
62: Shutdown gryphon 2001-05-03 21:14:09: LMC failure (vossough.snf.stanford.edu)
63: Re: Shutdown gryphon 2001-05-03 21:14:09: LMC failure (jhaydon.snf.stanford.edu)
64: Shutdown gryphon 2001-05-22 23:32:30: LMC failure (vossough.snf.stanford.edu)
65: Shutdown gryphon 2001-05-22 23:36:46: LMC Failure (vossough.snf.stanford.edu)
66: Re: Shutdown gryphon 2001-05-22 23:32:30: LMC failure (jhaydon.snf.stanford.edu)
67: Re: Shutdown gryphon 2001-05-22 23:36:46: LMC Failure (jhaydon.snf.stanford.edu)
68: Comment gryphon 2001-05-30 09:51:45: shut down to install new gauges (jhaydon.snf.stanford.edu)
69: Comment gryphon 2001-05-30 09:52:31: friday the gryphon will be shut down to install new gay`uges (jhaydon.snf.stanford.edu)
70: Problem gryphon 2001-05-30 17:50:21: "PMC Transmit Error" during PMC prepump (ibrahim.snf.stanford.edu)
71: Shutdown gryphon 2001-05-31 16:25:08: dead shutter motor will be down at least until monday (jhaydon.snf.stanford.edu)
72: Re: Shutdown gryphon 2001-05-31 16:25:08: dead shutter motor will be down at least until monday (jhaydon.snf.stanford.edu)
73: Re: Problem gryphon 2001-05-30 17:50:21: "PMC Transmit Error" during PMC prepump (jhaydon.snf.stanford.edu)
74: Problem gryphon 2001-06-22 03:31:29: flakey PPC (vossough.snf.stanford.edu)
75: Shutdown gryphon 2001-06-25 09:47:32: shut down to change oil (jhaydon.snf.stanford.edu)
76: Re: Shutdown gryphon 2001-06-25 09:47:32: shut down to change oil (jhaydon.snf.stanford.edu)
77: Regen (Jim Haydon)
78: Problem gryphon 2001-08-01 21:05:40: PMC error (pclin.snf.stanford.edu)
79: Shutdown gryphon 2001-08-02 18:33:02: No Ar flow (caudillo.snf.stanford.edu)
80: Problem gryphon 2001-08-03 23:43:54: PMC Failure (pclin.snf.stanford.edu)
81: Re: Problem gryphon 2001-06-22 03:31:29: flakey PPC (jhaydon.snf.stanford.edu)
82: Re: Problem gryphon 2001-08-01 21:05:40: PMC error (jhaydon.snf.stanford.edu)
83: Re: Problem gryphon 2001-08-03 23:43:54: PMC Failure (jhaydon.snf.stanford.edu)
84: Re: Shutdown gryphon 2001-08-02 18:33:02: No Ar flow (jhaydon.snf.stanford.edu)
85: Cal Factor (Jim Haydon)
86: Problem gryphon 2001-08-07 21:16:32: dummy did not unload properly (kjliu.snf.stanford.edu)
87: Problem gryphon 2001-08-10 18:56:30: cathode arcing error (mbartsch.snf.stanford.edu)
88: Shutdown gryphon 2001-08-25 06:30:02: shut down for work on air handeling system (jhaydon.snf.stanford.edu)
89: Re: Shutdown gryphon 2001-08-25 06:30:02: shut down for work on air handeling system (rcrane.snf.stanford.edu)
90: Problem gryphon 2001-09-24 23:43:03: cryo dead following power glitch (ericp.snf.stanford.edu)
91: Shutdown gryphon 2001-09-25 01:29:46: cryo making a loud noise. it won't cool down. (cbaxter.snf.stanford.edu)
92: Re: Shutdown gryphon 2001-09-25 01:29:46: cryo making a loud noise. it won't cool down (jhaydon.snf.stanford.edu)
93: Re: Problem gryphon 2001-09-24 23:43:03: cryo dead following power glitch (jhaydon.snf.stanford.edu)
94: Re: Problem gryphon 2001-08-10 18:56:30: cathode arcing error (jhaydon.snf.stanford.edu)
95: Re: Problem gryphon 2001-08-07 21:16:32: dummy did not unload properly (jhaydon.snf.stanford.edu)
96: Shutdown gryphon 2001-10-06 11:50:11: pmc failure (hjcho.snf.stanford.edu)
97: Re: Shutdown gryphon 2001-10-06 11:50:11: pmc failure (jhaydon.snf.stanford.edu)
98: Problem gryphon 2001-10-11 19:43:38: Cathode Arc (true.snf.stanford.edu)
99: Problem gryphon 2001-10-14 13:57:07: PMC failure (junghwa.snf.stanford.edu)