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Threads for March 2000
March 2000
[1] Problem implanter350: Beam oscilloscope does not register scan voltage. After my run, the oscilloscope screen blanked out. I still can read a current and modify other parameters, but there is no display.
[1] Problem implanter350: Implanter problems: DP#1 error; won't return wafers; apparent pump error (E60)
[1] Problem implanter350: E 60 error
[1] Problem implanter350: Implanter350 has a pressure problem: E60 error keeps on coming up.
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