Messages 0xx

---

01: Problem implanter350: Beam oscilloscope does not register scan voltage. After my run, the oscilloscope screen blanked out. I still can read a current and modify other parameters, but there is no display. ((none))
02: Problem implanter350: Implanter problems: DP#1 error; won't return wafers; apparent pump error (E60) ((none))
03: Problem implanter350: E 60 error ((none))
04: Problem implanter350: Implanter350 has a pressure problem: E60 error keeps on coming up. ((none))
05: Problem Clear implanter350: Implanter repaired ((none))
06: Shutdown implanter350: shut down for vacuum hold test ((none))
07: Shutdown Clear implanter350: vacumm hold ((none))
08: Shutdown implanter350: BF3 pressure reg. inoperative ((none))
09: Shutdown Clear implanter350: Vacuum hold test (mramsey.snf.stanford.edu)
10: Problem implanter350: broken wafer (king.snf.stanford.edu)
11: Problem Clear implanter350: removed wafer and repaired DP problem (mramsey.snf.stanford.edu)
12: Shutdown implanter350: no filament current (aaronp.snf.stanford.edu)
13: Shutdown Clear implanter350: replaced filament (mramsey.snf.stanford.edu)
14: Shutdown implanter350: HV cutts out every 10min (at 60Kev) (aaronp.snf.stanford.edu)
15: Shutdown Clear implanter350: repaired shorting rod (mramsey.snf.stanford.edu)
16: Problem implanter350: no arc voltage (yiching.snf.stanford.edu)
17: Problem Clear implanter350: repair source hi-vac section (mramsey.snf.stanford.edu)
18: Problem implanter350: res control off error (mramsey.snf.stanford.edu)
19: Shutdown implanter350: Implanter filament (king.snf.stanford.edu)
20: Shutdown Clear implanter350: Problem cleared after filament burn in (mramsey.snf.stanford.edu)
21: Problem Clear implanter350: problem now affects both end stations (mramsey.snf.stanford.edu)
22: Shutdown implanter350: end station power supply is dead (mramsey.snf.stanford.edu)
23: Shutdown Clear implanter350: (king.snf.stanford.edu)
24: Shutdown implanter350: Implanter voltage (king.snf.stanford.edu)
25: Shutdown Clear implanter350: re set up and ran @ 140 KeV (mramsey.snf.stanford.edu)
26: Shutdown implanter350: wafer is stuck in implanter (king.snf.stanford.edu)
27: Shutdown Clear implanter350: wafer was removed. (king.snf.stanford.edu)
28: Problem implanter350: High Volts won't stay on (king.snf.stanford.edu)
29: Problem Clear implanter350: rebuilt source (mramsey.snf.stanford.edu)
30: Problem implanter350: possible water problem (king.snf.stanford.edu)
31: Re: Problem implanter350: possible water problem (Robin King)
32: Problem Clear implanter350: no problems found (mramsey.snf.stanford.edu)
33: Re-start of implanter after unscheduled power failure ... (John Shott)
34: Shutdown implanter350: no analyzer magnet current (aaronp.snf.stanford.edu)
35: Shutdown Clear implanter350: Analyzer magnet OK (shott.snf.stanford.edu)
36: Shutdown implanter350: front display is dead (king.snf.stanford.edu)
37: Shutdown Clear implanter350: We may be OK .... (shott.snf.stanford.edu)
38: Shutdown implanter350: Won't begin implant (king.snf.stanford.edu)
39: Problem implanter350: Beam energy problem (king.snf.stanford.edu)
40: Shutdown Clear implanter350: repaired by Randy Murdock. (booth.snf.stanford.edu)
41: Problem Clear implanter350: repaired by Randy Murdock. (booth.snf.stanford.edu)
42: Shutdown implanter350: wafers won't unload (yiching.snf.stanford.edu)
43: Shutdown Clear implanter350: cleared by field service (king.snf.stanford.edu)
44: Shutdown implanter350: wafer pick problem (king.snf.stanford.edu)
45: Re: Shutdown implanter350 2000-11-06 16:06:33: wafer pick problem (king.snf.stanford.edu)
46: Problem implanter350 2000-12-18 13:53:53: Ar controller is sensitive to adjustment (king.snf.stanford.edu)
47: Shutdown implanter350 2001-01-02 08:49:37: (booth.snf.stanford.edu)
48: Problem implanter350 2001-03-15 18:54:32: No arc current (king.snf.stanford.edu)
49: Re: Problem implanter350 2001-03-15 18:54:32: No arc current (king.snf.stanford.edu)
50: Re: Shutdown implanter350 2001-01-02 08:49:37: (king.snf.stanford.edu)
51: Re: Problem implanter350 2000-12-18 13:53:53: Ar controller is sensitive to adjustment (king.snf.stanford.edu)
52: Problem implanter350 2001-03-22 14:33:01: low current for B+, Phos (king.snf.stanford.edu)
53: Re: Problem implanter350 2001-03-22 14:33:01: low current for B+, Phos (jhaydon.snf.stanford.edu)
54: Problem implanter350 2001-07-12 17:33:36: implanter350 problem getting to DECEL (gladys.snf.stanford.edu)
55: defective board (Jim Haydon)
56: Problem implanter350 2001-08-09 11:59:51: implanter350: keeps on arcing on HV (gladys.snf.stanford.edu)
57: Shutdown implanter350 2001-08-25 06:31:07: shut down for work on air handeling system (jhaydon.snf.stanford.edu)
58: Re: Shutdown implanter350 2001-08-25 06:31:07: shut down for work on air handeling system (seymour.snf.stanford.edu)
59: Re: Problem implanter350 2001-08-09 11:59:51: implanter350: keeps on arcing on HV (jhaydon.snf.stanford.edu)
60: Re: Problem implanter350 2001-07-12 17:33:36: implanter350 problem getting to DECEL (jhaydon.snf.stanford.edu)
61: Problem implanter350 2002-01-29 10:55:45: prob with Boron not flowing continuously (gladys.snf.stanford.edu)
62: Problem implanter350 2002-01-31 08:57:08: out of phosphine (gladys.snf.stanford.edu)
63: Re: Problem implanter350 2002-01-29 10:55:45: prob with Boron not flowing continuously (gladys.snf.stanford.edu)
64: Re: Problem implanter350 2002-01-31 08:57:08: out of phosphine (jhaydon.snf.stanford.edu)
65: Problem implanter350 2002-04-17 09:11:24: source vacuum system is dead. (gladys.snf.stanford.edu)
66: Shutdown implanter350 2002-04-18 14:14:58: source pump pressure is high (gladys.snf.stanford.edu)
67: Re: Shutdown implanter350 2002-04-18 14:14:58: source pump pressure is high ...... (gladys.snf.stanford.edu)
68: Re: Problem implanter350 2002-04-17 09:11:24: source vacuum system is dead. (jhaydon.snf.stanford.edu)
69: Problem implanter350 2002-04-22 15:36:06: filament had died... (gladys.snf.stanford.edu)
70: Re: Problem implanter350 2002-04-22 15:36:06: filament had died... (jhaydon.snf.stanford.edu)
71: Problem implanter350 2002-04-30 09:14:47: research cube not going to hivac (gladys.snf.stanford.edu)
72: Re: Problem implanter350 2002-04-30 09:14:47: research cube not going to hivac (jhaydon.snf.stanford.edu)
73: Problem implanter350 2002-05-15 09:23:55: Out of Boron (gladys.snf.stanford.edu)
74: Source gas valves not working (Jim Haydon)
75: Re: Problem implanter350 2002-05-15 09:23:55: Out of Boron (jhaydon.snf.stanford.edu)
76: Re: Shutdown implanter350 2002-05-17 15:58:08: gas control valve not working: it's now working (gladys.snf.stanford.edu)
77: Shutdown implanter350 2002-05-29 10:25:07: down fro regen and arc problem (jhaydon.snf.stanford.edu)
78: Re: Shutdown implanter350 2002-05-29 10:25:07: down fro regen and arc problem (jhaydon.snf.stanford.edu)
79: Shutdown implanter350 2002-08-31 22:11:40: N2 leak- loud! (ericp.snf.stanford.edu)
80: Re: Shutdown implanter350 2002-08-31 22:11:40: N2 leak- loud! (jhaydon.snf.stanford.edu)
81: Shutdown implanter350 2003-01-22 16:35:20: water leak (jhaydon.snf.stanford.edu)
82: Re: Shutdown implanter350 2003-01-22 16:35:20: water leak (jhaydon.snf.stanford.edu)
83: Shutdown implanter350 2003-06-12 14:01:08: Report Shutdown for implanter350:unstable arc current (gladys.snf.stanford.edu)
84: Re: Shutdown implanter350 2003-06-12 14:01:08: Report Clear for implanter350 (gladys.snf.stanford.edu)
85: Comment implanter350 2003-06-26 14:35:34: Report Comment for implanter350 (tberg.snf.stanford.edu)
86: Shutdown implanter350 2003-07-10 16:33:01: Report Shutdown for implanter350 (jhaydon.snf.stanford.edu)
87: Re: Shutdown implanter350 2003-07-10 16:33:01: Report Clear for implanter350 (jhaydon.snf.stanford.edu)
88: Shutdown implanter350 2003-10-14 11:21:34: Report Shutdown for implanter350 (shott.snf.stanford.edu)
89: Re: Shutdown implanter350 2003-10-14 11:21:34: Report Clear for implanter350 (jhaydon.snf.stanford.edu)
90: Shutdown implanter350 2003-11-04 13:34:23: Report Shutdown for implanter350 (shott.snf.stanford.edu)
91: Comment implanter350 2003-11-04 15:05:20: Report Comment for implanter350 (tberg.snf.stanford.edu)
92: Re: Shutdown implanter350 2003-11-04 13:34:23: Report Shutdown for implanter350 (jhaydon.snf.stanford.edu)
93: Shutdown implanter350 2004-01-05 16:04:13: (jhaydon.snf.stanford.edu)
94: Re: Shutdown implanter350 2004-01-05 16:04:13: (jhaydon.snf.stanford.edu)
95: Shutdown implanter350 2004-01-05 16:05:08: (jhaydon.snf.stanford.edu)
96: Re: Shutdown implanter350 2004-01-05 16:05:08: (shott.snf.stanford.edu)
97: Shutdown implanter350 2004-01-23 10:02:11: filament supply (jhaydon.snf.stanford.edu)
98: Re: Shutdown implanter350 2004-01-23 10:02:11: filament supply (jhaydon.snf.stanford.edu)
99: Shutdown implanter350 2004-02-25 07:20:23: broken coupler on backing pump for the source diff pump (jhaydon.snf.stanford.edu)

---