Subject: Chlorine and HBr shutdown, Thur am-Fri noon
From: Mary Tang <>
Date: Tue, 20 Mar 2012 14:33:39 -0700

Dear pquest-, p5000etch- and lampoly- users --

The duct work in the corrosives gas vault has been rescheduled.  So 
please be aware that from Thursday morning through Friday around noon, 
chlorine and hydrogen bromide will be unavailable.  I've reserved the 
tools, just to flag this, but tools should be otherwise usable for other 

Thanks for your attention and apologies for the inconvenience --

Your SNF Staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305